Calibration Interferometer SP 15000 C5 NG - Technical Summary
System Parameters:
- Length Measurement: Range from 0 m to 50 m with a resolution of 0.3 nm.
- Angle Measurement: Pitch and yaw angles range ±5° with a resolution of 0.05 µrad.
- Straightness Measurement: Lateral range ±4 mm, resolution 10 nm, axial range 0.1 to 4 m / 0.3 to 10 m.
Measurement Uncertainty:
- Length: ±0.2 µm/m under stable conditions.
- Angle: ±0.04% ± 0.04 µrad.
- Straightness: For 0.1 to 4 m: ±0.1% ± 0.1·(M)² μm ± 0.25 μm; for 0.3 to 10 m: ±0.15% ± 0.1·(M)² μm ± 0.25 μm.
Additional Specifications:
- Beam Distance: 50 mm (horizontal and vertical).
- Wavelength: 632.8 nm.
- Frequency Stability: 2·10-8 for the HeNe laser.
- Warm-up Time: 20 minutes for the HeNe laser.
- Operating Temperature: 15 to 30°C.
- Max Displacement Speed: 3 m/s for the measuring reflector.
Geometric Data:
- Dimensions: Sensor head [284 x 168 x 141] mm, Reflector unit [74 x 81 x 88] mm, Straightness mirror [132 x 103 x 82] mm, Electronic unit [450 x 450 x 150] mm.
- Mass: Sensor head 5.2 kg, Reflector unit 585 g, Straightness mirror 600 g, Electronic unit 11 kg.
Electrical Data:
- Interfaces: Standard USB, other interfaces available on request.
- Cable Length: 6 m between sensor head and electronics unit, other lengths available on request.
- Power Supply: 100 to 240 VAC / 47 to 63 Hz.
- Laser Safety Class: 2M according to EN 60825-1:2014 and ANSI Z136.1 (CDRH).
Note: Specifications are subject to change.
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