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Technical data sheet: Calibration laser interferometer SP 15000 C5

Technical data sheet: Calibration laser interferometer SP 15000 C5

Product catalog summary
Calibration Interferometer SP 15000 C5 NG - Technical Summary
System Parameters:
  • Length Measurement: Range from 0 m to 50 m with a resolution of 0.3 nm.
  • Angle Measurement: Pitch and yaw angles range ±5° with a resolution of 0.05 µrad.
  • Straightness Measurement: Lateral range ±4 mm, resolution 10 nm, axial range 0.1 to 4 m / 0.3 to 10 m.
Measurement Uncertainty:
  • Length: ±0.2 µm/m under stable conditions.
  • Angle: ±0.04% ± 0.04 µrad.
  • Straightness: For 0.1 to 4 m: ±0.1% ± 0.1·(M)² μm ± 0.25 μm; for 0.3 to 10 m: ±0.15% ± 0.1·(M)² μm ± 0.25 μm.
Additional Specifications:
  • Beam Distance: 50 mm (horizontal and vertical).
  • Wavelength: 632.8 nm.
  • Frequency Stability: 2·10-8 for the HeNe laser.
  • Warm-up Time: 20 minutes for the HeNe laser.
  • Operating Temperature: 15 to 30°C.
  • Max Displacement Speed: 3 m/s for the measuring reflector.
Geometric Data:
  • Dimensions: Sensor head [284 x 168 x 141] mm, Reflector unit [74 x 81 x 88] mm, Straightness mirror [132 x 103 x 82] mm, Electronic unit [450 x 450 x 150] mm.
  • Mass: Sensor head 5.2 kg, Reflector unit 585 g, Straightness mirror 600 g, Electronic unit 11 kg.
Electrical Data:
  • Interfaces: Standard USB, other interfaces available on request.
  • Cable Length: 6 m between sensor head and electronics unit, other lengths available on request.
  • Power Supply: 100 to 240 VAC / 47 to 63 Hz.
  • Laser Safety Class: 2M according to EN 60825-1:2014 and ANSI Z136.1 (CDRH).
Note: Specifications are subject to change.
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Catalog excerpts

Technical data sheet: Calibration laser interferometer SP 15000 C5-1

Technical data sheet *least significant bit (LSB) 08/2026 ■ Subject to change. SIOS MeBtechnik GmbH

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.