SIOS products 2020
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Catalog excerpts

SIOS products 2020 - 3

Measuring devices and sensors 4 Length, differential length and angle measurement 6 Distance, angle and straightness measurement 9 Vibration measurement on micro-objects 12 Tactile thickness measurement and calibration 13 Frequency and amplitude stabilized lasers 14 Climate measuring station 17

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SIOS products 2020 - 4

Length measurement Universal length measuring systems of the highest accuracy for measurements and calibrations of guides, measuring workstations and positioning tables, measuring machines and machine tools and for multiple coordinated measurements The measuring systems are easy to handle, have an integrated alignment aid and are able to work with just a reflective surface as a reflector. Laser interferometer model SP 5000 NG • single measuring beam • for measuring arrangements free of Abbe error • tilting angle by using a reflector maximum up to ± 12.5 ° • suitable for x-y positioning for...

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SIOS products 2020 - 5

A modification of the standard device is the SP 15000 NG, which allows an extended measuring range. This measuring system is ideally suited for calibrations and measurements of large positioning units like CMM's or large machine tools. We recommend the use of wireless sensors or the climate measuring station LCS to achieve the best results. Laser interferometer model SP 15000 NG • for long distance measuring ranges • tilting angle of reflector maximum up to ± 22.5 ° • compact device with suitcase for free mobility

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SIOS products 2020 - 6

Measuring devices and sensors Length, differential length and angle measurement Highly stable laser interferometer with two parallel measuring beams for a wide variety of applications in the field of science and for industrial use Due to differential measurement a remarkable stability for long-term usage and a compensation of the influences of air can be achieved. Laser interferometer model SP 5000 DI • beam distance 21 mm (other options for beam distances on request) • temperature sensitivity < 20 nm / K 2 m with plane-mirror 5 m with reflector ± 1.5 arcmin with plane-mirror ± 12.5 ° with re

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SIOS products 2020 - 7

Differential feedback measurement . Laser interferometer model SP 5000 DI/F • beam distance 14 mm (other options for beam distances on request) • temperature sensitivity < 20 nm / K • OEM version of the device for the integration as encoder in machine axes 2 m with plane-mirror 5 m with reflector ± 1.5 arcmin with plane-mirror ± 15 ° with re

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SIOS products 2020 - 8

Measuring devices and sensors High-precision laser interferometers with three perfectly aligned and independently working measuring beams for simultaneous measurements of length and angle Either a mirror or the included reflector combination can be used as a reflector. Optionally, an alignment aid can be integrated in the sensor. Laser interferometer model SP 5000 TR • simultaneous length measurements as well as pitch and yaw angle acquisition with the highest accuracy • beam distances 12 mm • OEM and vacuum versions of the device are possible ± 12.5 ° with reflector ± 1.5 ' with plan

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SIOS products 2020 - 9

Distance, angle and straightness measurement High precision laser interferometers with multiple beams for simultaneous measurements of length, angle and straightness for calibration and alignment of axes of measuring machines like CMM's and machine tools We recommend the use of wireless sensors or the climate measuring station to achieves the best results. Laser interferometer model SP15000 C3/C5 • interferometric measurement of up to 5 DOF of movement • diverse accessories for attachment of sensor head and optical components available • calibration software according to DIN and ISO standards

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SIOS products 2020 - 10

Measuring devices and sensors Vibration measurement Non-contact vibration measurements with precise focused beam suited for measurements on almost every surface Determination of vibration spectra, vibration modes and resonant frequencies of macro and micro objects Laser interferometric vibrometer model LSV 120 NG • working distance fixed at (customer specific) 30 … 70 mm / 240 mm / 480 mm • diameter of laser spot 12 … 30 μm / 100 μm / 200 μm • protected interior optics

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SIOS products 2020 - 11

Variable measuring distance for an easy and flexible handling at measurement objects In combination with a tripod, it’s an ideal measuring instrument for usage at different locations. Laser interferometric vibrometer model LSV 2500 NG • working distance continuously adjustable: 240 mm to 2500 mm

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SIOS products 2020 - 12

Measuring devices and sensors Vibration measurement on micro-objects Measurements of the dynamic performance of microstructures, MEMS and cantilevers Determination of the vibration modes by surface scanning Nano Vibration Analyzer NA • scan field range: 50 mm x 50 mm • microscope magnification: 10 x, 50 x • laser spot diameter: ≤ 10μm, ≤ 2 μm

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SIOS products 2020 - 13

Tactile thickness measurement and calibration Fiber-coupled precision gauging probe for tactile thickness measurements and calibration of fixed measuring standards with a high linearity for the entire measuring range Also available as a differential probe for ultraprecise thickness measurements This measurement system forms the basis for customer-specific measuring stations in the optics and semiconductor industry. Laser interferometric gauging probe LM • linearity ≤ ± 2 nm • factory fixed measuring force: 0.5 … 1.5 N • measuring spindle with motorized drive • traceable to national standards

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SIOS products 2020 - 14

Frequency and Lichtquelle amplitude stabilized lasers Highly stable light sources as a measuring standard for laser-optical measuring technology with frequency standards at a wavelength of 632.8 nm Coupling to a PM fiber in combination with a Faraday isolator is available. Calibration of the laser frequency by an iodine-stabilized HeNe laser is possible for all lasers.

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