SIOS products
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MeBtechnik GmbH MeBtechnik GmbH PRODUCTS Precision in Measurement

PRECISION IN MEASUREMENT Length • Angle • Straightness • Vibration • Temperatu

SIOS MeBtechnik GmbH 4 Measuring devices and sensors 6 Length, differential length or angle measurement 8 Length and angle measurement 10 Length, differential, and angle measurement 11 Displacement, angle, straightness measurement and calibration 12 Vibration measurement on micro-objects 15 Tactile thickness measurement and calibration 16 Frequency and amplitude stabilized lasers 22 Precision climate measuring station 24

SIOS Meßtechnik GmbH Founded in 1991 with roots originating at the Technical University of Ilmenau, SIOS Meßtechnik GmbH is a developer and manufacturer of precision measuring instruments and combines scientific accuracy and quality with industrial efficiency. Our close proximity to science and research guarantees a high expertise for today and for the upcoming future. The focus of our measuring instruments is on laser interferometric measuring systems. Our products provide reliable and highly accurate results for a variety of measurement tasks in science and research, quality control,...

INDUSTRIAL PERFORMANCE Precision in Measurement for • quality control • volumetric compensation for machines • customized solution SCIENTIFIC COMPETENCE Precision in Measurement for • fundamental research • vacuum and cleanroom applications • traceable applications • dynamic data acquisition • metrological assemblies

Length measurement Universal length measuring systems of the highest accuracy for measurements and calibrations of guides, measuring workstations and positioning tables, measuring machines and machine tools and for multiple coordinated measurements. The measuring systems are easy to handle, have integrated alignment aids and are able to work with just a reflective surface as a reflector. Laser interferometer model SP 5000 NG • single measuring beam • accommodates tilting angle of reflector up to ± 12.5° • suitable for combined x-y positioning measurements using multiple sensor heads and...

A modification of the standard device is the SP 15000 NG, which allows an extended measuring range. This measuring system is ideally suited for calibrations and measurements of large positioning units like CMM's or large machine tools. We recommend the use of wireless temperature sensors or the climate measuring station to achieves the best results. Long-Range laser interferometer model SP 15000 NG • for long distance measuring ranges up to 80 m • accommodates tilting angle of reflector up to ± 22.5° • compact device with suitcase for free mobility

Length, differential length, and angle measurement Highly stable laser interferometer with two parallel measuring beams for a wide variety of applications in the field of science and for industrial use. Differential measurement principle allows for remarkable stability during long-term measurements and enhanced compensation of environmental changes. Differential laser interferometer model SP 5000 DI • ultra-stable, high-resolution, long-therm measurement • beam distance 21 mm (other beam distances on request) • extremely low temperature sensitivity <20 nm/K with plane mirror ±12.5° with...

Differential laser interferometer model SP 5000 DI/F • special design for feedback applications • beam distance 14 mm (other beam distances upon request) • extremely low temperature sensitivity <20 nm/K with plane mirror ±15° with reflector

Length and angle measurement High-precision laser interferometers with three perfectly parallel aligned and independently working measuring beams for simultaneous measurements of length and angles. Either a mirror or the original SIOS reflector unit be used as a reflector. An alignment aid can be integrated in the sensor to align the beam directions to the direction of target movement. Triple beam laser interferometer model SP 5000 TR • simultaneous length measurements as well as pitch and yaw angle acquisition with the highest accuracy • for measuring arrangements free of Abbe error • beam...

Length, differential length, and angle measurement The SP 5000 DI/DS interferometer combines the advantages of a differential interferometer with those of a multi-beam interferometer. For the first time, it combines a highly stable length measurement based on the differential principle with a high-resolution interferometric tilt angle measurement. This makes it possible to detect not only the tiniest movements, but also the smallest tilts over larger areas without the results being subject to thermal and physical environmental influences. Displacement angle differential interferometer model...

Displacement, angle, straightness measurement and calibration High precision laser calibration system with multiple beams for measuring length, pitch angle, yaw angle, roll angle and straightness, for calibration and alignment of axes. Highly demanded in the machine tool field and CMM calibration, up to volumetric calibration. We recommend the use of wireless temperature sensors or the climate measuring station to achieves the best results. Calibration laser interferometer model SP 15000 C3/C5/C6 • interferometric measurement for up to 6 DoF simultaneously • Roll angle sensors optionally...

Vibration measurement Non-contact vibration measurements with focused measurement beam able to detect vibration on almost every surface, rough surfaces included. Determination of vibration spectra,vibration modes, and resonant frequencies of macro and micro objects. Laser interferometric vibrometer model LSV 120 NG • working distance fixed at (customer specific) 30 ... 70 mm / 240 mm / 480 mm • diameter of laser spot 12 ... 30 pm / 100 pm / 200 pm • protected interior optics

Variable measuring distance for easy and fast beam focusing on measurement object surfaces. In combination with a tripod, it's an ideal vibration measuring instrument for usage at different locations. Laser interferometric vibrometer model LSV 2500 NG • working distance continuously adjustable: 240 mm to 2500 mm • digital and analog data output