Meßtechnik GmbH Precision redefined Simultaneous length and angle measurement with the Triple beam laser interferometer SP 5000 TR Faster and more reliable measurement results Reduction in measurement uncertainty Improved reproducibility Time saving in the measuring process

PRECISION IN MEASUREMENTLength • Angle • Straightness • Vibration • Temperature Top-Innovator 6 | The challenges Thermal influences in laser interferometric length and angle measurement 7 | The solution Triple beam interferometer SP 5000 TR for simultaneous, precise measurement of length, pitch, and yaw angles 4 Typical challenges of precise length and angle measurement 7 The solution: the SP 5000 TR triple beam laser interferometer 10 Case Study 1: High-precision length measurement without Abbe errors 11 Case Study 2: Length measurement at close range without misalignment 12 Case Study 3: Dynamic...

The challenge Precision is a decisive factor in modern industry and research. Typical challenges of precise length and angle measurements In many high-tech industries such as mechanical engineering, Loss of time due to time-shifted measurements semiconductor production and optics, the requirements for Length and angle measurements are often carried measurement uncertainty and process control are becoming out separately, which is not only time-consuming, To meet these challenges, our development but also leads to unknown deviations in the ove- team has designed the triple beam laser rall result...

The solution Thermal influences in thelaser interferometric length and angle measurement Conclusion: A fast and simultaneous acquisition of several degrees of freedom enables a coherent analysis of measurement deviations. As a result, the influences of temperature fluctuations on various measured variables can be reduced, as these are measured simultaneously. Materials Coefficient of linear expansion Thermal conductivity In industrial and scientific applications, measuring equipment rarely consists of a single material. Granite, stainless steel, titanium, invar, aluminum, ceramic and glass are...

Triple beam laser interferometer SP 5000 TR Triple beam interferometers are precision length measuring devices that combine three interferometers in one device. All three measuring channels are fed by a light source with the same, highly stable laser frequency. This means that three length values can be measured simultaneously with nanometer accuracy. The pitch and yaw angles can be determined with high resolution and precision from the difference between two length values and the calibrated beam distance. Optionally, roll angle measurement can be integrated via additional sensors. The interferometer...

Case Study 2 High-precision length measurement without Abbe errorLength measurement at close range without misalignment Precise length measurement poses a particular challenge if the measuring reflector cannot be positioned in alignment with the axis of movement. This offset leads to the so-called Abbe error, which can significantly affect the measurement uncertainty. The illustration shows that it is generally not geometrically possible to place the measuring axis of the interferometer directly in the drive axis of the guideway to be measured. The distance between the drive axis and the measuring...

Dynamic angle measurement with a lightweight reflector High-resolution dynamic angle measurement on optical surfaces Measurements in dynamic applications often require Possible applications lightweight measuring equipment so that these move- Optical quality surfaces with poor reflective proper- Possible applications ties that tilt pose a particular challenge for precise ments are not influenced by their own weight. This Highly dynamic applications applies in particular to fast, complex movements The SP 5000 TR can measure precise angle changes such as those that occur in research and industrial...

Highly stable long-term, length and angle measurement Highly stable length and angle measurement in a vacuum Laser interferometers that work according to the Possible applications differential principle are used when particularly high Measurements in vacuum require special conside- Possible applications ration paid to the materials used and on cleanliness demands are placed on the stability of measured Highly stable measuring arrangements during the manufacturing of the sensor. The design Vacuum-optimized materials values over long periods of time. The measuring and The influence of the dead...

Case Study 8 Fast acceptance measurements in the production of linear axesLength and angle measurement in difficult-to-reach measurement setups Precise and fast acceptance measurements are essential in the modern production of linear axes. Particularly with high cycle times, measurements must be performed dynamically, simultaneously and with maximum precision in order to capture all relevant degrees of freedom of an axis. The triple beam laser interferometer SP 5000 TR in combination with the InfasAXIS software offers an optimal solution for this. This system enables the simultaneous recording...

Measuring room monitoring The right accessories for the SP 5000 TR triple beam laser interferometer Precise measuring room monitoring for reliable measurement results Especially in industrial environments, measurements SIOS offers you the equipment and software are not always carried out under ideal laboratory for seamless monitoring of your measuring conditions or in optimized measuring rooms. room environment. However, monitoring the ambient conditions is of Triple reflector unit Triple reflector unit Lightweight construction Triple reflector unit crucial importance LCS-Temp – Mobile set for...

The right software for the SP 5000 TR triple beam laser interferometer InfasWB Software for data acquisition and visualization Universal functions for measurement data acquisition, visualization and storage SignalMonitor Freeware for aligning interferometers Interferometer status and signal quality InfasAXIS InfasMTCAL Calibration software according to VDI/ISO standards for the calibration of linear axes Detection of position, pitch and yaw angles and straightness according to VDI/ISO standards Software for calibration and volumetric compensation Calibration, error analysis and verification Application...