Nanopositioning platform NPP-1

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Nanopositioning platform NPP-1

Product catalog summary

System Specifications

Positioning Measurement Range: Diameter of 100 mm
Lateral Measurement Resolution: ≤ 0.02 nm
Repeatability: Less than 2 nm
Travelling Range in rz: Maximum 60 arcsec with zero point control
Metrological Traceability: Utilizes 3 fiber-coupled differential laser interferometers
Laser Wavelength: 633 nm
Laser Frequency Stability: Less than 2 ⋅ 10^-8
Positioning Speed: 20 mm/s
RMS Servo Error: Less than 2 nm RMS
Mirror Base Body: Zerodur or quartz
Payload Capacity: 5 kg
Positioning Method: Point-to-point, path generator
Media Required: Compressed air at 6 bar, filtered, dried, and deoiled

AFM Options

AFM Measurement: Force control
Lithography Mode: FN emission control
FN Power Source: Available
Piezo Scanner Range: 30 x 30 x 10 μm
Linearization: Capacitive
Visualization Optics: Long-range

Geometric Data

Dimensions: 820 x 710 x 800 mm (W x D x H)
Mass: 300 kg

Electrical Data

Interfaces: Standard RS232C, USB; other interfaces available on request
Cable Length: 3 m, optional up to 10 m
Power Supply: 100...240 VAC / 47...63 Hz
Laser Protection Class: According to EN 60825-1:2014 and ANSI Z136.1 (CDRH) - Class 2M, II

Note: Specifications are subject to change as of 04/2022.

Catalog excerpts

Technical data sheet Nanopositioning platform NPP-1 System parameter SIOS MeBtechnik GmbH 98693 Ilmenau/Germany • Am Vogelherd 46 • Fon: +49 (0) 3677 64 47-0 • [email protected] • www.sios-precision.com

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