Meßtechnik GmbH Product information Vibrometer system for microstructures and MEMS

Nano Vibration Analyzer NA The Nano Vibration Analyzer NA is a combination of a fiber-coupled vibrometer of the LSV 120 NG series with an engineering microscope. The system is ideally suited for measuring the dynamic behavior and static deflection of microstructures, MEMS and cantilevers. Depending on the objective used, a measurement spot size of less than 2 µm can be achieved. The measured object can be positioned and scanned over a wide range using an X-Y stage and can be observed through a camera. The microscope objective is interchangeable and defines both the visible range and the laser...

MEASUREMENT SETUP Camera System Measuring object Tilt table Areas of Application: • vibration and displacement measurement on microcomponents, MEMS • non-contact vibration measurement on surfaces of any roughness • determination of vibration spectra • determination of vibration modes • determination of natural frequencies on microobjects and macroscopic components • multi-coordinate measurements with multiple systems Ideal für • quality control • science / research

For customer-specific versions, OEM applications or integration in special measuring stations, please contact us. We will be happy to personally assist you in finding solution to your measuring tasks. SIOS Meßtechnik GmbH Am Vogelherd 46 98693 Ilmenau / Germany Phone: +49 (0) 3677 64 47-0 E-mail: [email protected]