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data sheet Calibration Interferometer SP 15000 C3 NG

data sheet Calibration Interferometer SP 15000 C3 NG

Product catalog summary
System Specifications
  • Length Measurement: Range from 0 m to 50 m with a resolution of 0.3 nm.
  • Angle Measurement: Pitch and yaw angles range ±5° with a resolution of 0.05 μrad.
  • Roll Angle Measurement (Optional): Range ±17.5 mrad with a resolution of 0.9 µrad.
  • Measuring Uncertainty: Length measurement uncertainty is ±0.2 µm/m. Angle measurement uncertainty is ±0.04% ± 0.04 µrad. Roll angle measurement uncertainty varies with temperature.
  • Beam Distance: 50 mm horizontally and vertically.
  • Wavelength: 632.8 nm with a frequency stability of 2·10-8.
  • Warm-up Time: 20 minutes for the HeNe laser.
  • Operating Temperature: 15°C to 30°C.
  • Max Displacement Speed: 3 m/s for the measuring reflector.
Geometric Data
  • Dimensions: Sensor head [207 x 168 x 141] mm, Reflector unit [74 x 50 x 74] mm, Electronic unit [450 x 450 x 150] mm, Optional roll angle sensor [74 x 54 x 77] mm.
  • Mass: Sensor head 5 kg, Reflector unit 390 g, Electronic unit 9.4 kg, Optional roll angle sensor 425 g.
Electrical Data
  • Interfaces: Standard USB, other interfaces available on request.
  • Cable Length: 6 m between sensor head and electronics unit, customizable on request.
  • Power Supply: 100-240 VAC, 47-63 Hz.
  • Laser Safety Class: Complies with EN 60825-1:2014 and ANSI Z136.1 (CDRH) standards, classified as 2M and II.

Note: Specifications are subject to change as of August 2026.

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Catalog excerpts

data sheet Calibration Interferometer SP 15000 C3 NG-1

Technical data sheet *least significant bit (LSB) 08/2026 ■ Subject to change. SIOS MeBtechnik GmbH

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.