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data sheet Calibration Interferometer SP 15000 C3 NG
1 /1Page

data sheet Calibration Interferometer SP 15000 C3 NG

data sheet Calibration Interferometer SP 15000 C3 NG
1 /1Page

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data sheet Calibration Interferometer SP 15000 C3 NG-1

Technical data sheet *least significant bit (LSB) 02/2026 • Subject to change. SIOS MeBtechnik GmbH

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