nn Ideal for pilot plants, hydrogenation reactors, and autoclave processes nn Measure and control gas mass flow rates over an inlet pressure range of 500 to 5000 psig (34.5 to 345 barg) nn Flow ranges from 100 sccm to 20 slpm nn High accuracy +/- 1.0% of full scale; repeatability +/- 0.2% of full scale nn Wide differential pressure range from 0.345 bard (5 psid) to 345 bard (5000 psid) nn Innovative new ValFlex™ control valve design for precision control over a wide range of pressures and flow rates nn Leak-by of as little as 4 sccm at 5000 psid (345 bard), depending on orifice nn Inert, carbon-reinforced polyamide valve seat increases valve durability and precision nn Special high pressure rated seals minimize gas permeability nn Add Sierra’s Compod™ to run small-scale pilot plants or control high pressure reactors and autoclave processes without the expense of DCS or PLC systems. nn Proprietary high pressure calibration facility, directly traceable to NIST nn 24 VDC input power reduces installation cost and complexity nn Unique Pilot Module (mounted or hand-held) lets you view and change critical control functions nn Choose from multiple analog or digital signals nn Supports Modbus, Profibus DP, Foundation Fieldbus nn CE approved Ultra-High Pressure Digital Gas Mass Flow Meters & Controllers recision flow measurement and control at very high gas pressures is among the most challenging applications in the flow industry. Leaks, gas behavioral changes, and unpredictable valve control can all lead to reduced performance. Designed to overcome these challenges, the 100HP combines the high performance of the SmartTrak® with a wider, more robust flow body, all-welded sensor seals, an innovative new valve design called ValFlex™, and a state-of-the-art high pressure calibration facility. The result is an instrument with increased application flexibility and accuracy in high pressure gas flow control applications. To increase valve performance and accuracy under high pressures, Sierra’s proprietary ValFlex™ valve seat technology uses a flexible, high-impact, carbonreinforced polyamide valve seat material to assure smooth interaction with the valve orifice. The result is precision control over a wide range of flows from 100 sccm to 20 slpm with an industry leading leak-by as little as 4 sccm at 5000 psid (345 bard), dependant on the orifice used. Because traditional valve seat elastomers like Viton, Neoprene and Kalrez swell and deform under high pressures, the 100HP uses harder, denser seals to minimize gas permeability. To ensure the 100HP delivers precise, high pressure measurement and control, each unit is calibrated on our proprietary NIST traceable high-pressure calibration facility using a gas booster, high-pressure accumulator tanks, and mirrored precision pressure gauges, yielding highly accurate inlet and outlet pressures to match the customer’s application perfectly. An instrument designed with purpose, the 100HP is a versatile solution for the most challenging highpressure gas mass flow

PRESSURE SPECIFICATIONS PERFORMANCE SPECIFICATIONS Accuracy ± 1.0% of full scale including linearity under calibration conditions Repeatability ± 0.2% of full scale Temperature Coefficient ± 0.025% of full scale per °F (± 0.05% of full scale per °C) Pressure Coefficient ± 0.01% of full scale per psi (± 0.15% of full scale per bar), or better Response Time 5 seconds (typical) to within ± 2% of final value Mass Flow Rates C100L High Pressure Full Scale: 100 sccm to 20 slpm Flow ranges specified are for an equivalent flow of nitrogen at 760 mm Hg and 21 °C (70°F); other ranges in other units are available...

PHYSICAL SPECIFICATIONS Dimensions Height: 5.40 in (137.2 mm) Width: 6.06 in (154 mm*) Depth: 1.47 in (37.3 mm) *with ¼-inch compression fittings Free user software to allow for full configuration and readout of the instrument. High Pressure Calibration Facility Each unit is calibrated on our proprietary NIST traceable high pressure calibration facility using laboratory grade nitrogen gas. The facility consists of a gas booster, high-pressure accumulator tanks, a burst test outlet manifold, and a calibration outlet manifold. Wetted Material 316 stainless steel or equivalent; 416 stainless steel...

PHYSICAL DIMENSIONS DIMENSION L Length with Fittings in Inches (mm) Shade valve Shade Shade valve valve *Valve on C100HP-L controller only; not present on M100HP-L meter All dimensions are in inches with (mm) in brackets. Certified drawings are available on request. Mass Flow Controller Calibration Gauge for High-Pressure Accumulator Tank Used During Calibration

ParentInstructions: To order a 100HP-L, please fill in each number block by selecting the codes from the corresponding features below. *MFC only Note: Alternate among V1, V2, V3 with Pilot Module display/interface or SmartTrak Software Feature 7: External Setpoint Signals (MFC only) Feature 8: Electrical Connection Option 1: Digital Communications Option 2: Certificates MC Material certificates--US Mill certs on all wetted flow body parts CC Certificate of Conformance Note: Pilot Module not available with digital communications

ORDERING THE SMART TRAK 100 (continued) High-Pressure Mass Flow Controller – Actual Size ™ ValFlex, Compod are trademarks and ® SmartTrak is a registered trademark of Sierra Instruments, ® Nylon, Viton, Neoprene, Kalrez are registered trademarks of DuPont, ® Windows is a registered trademark of Microsoft Sierra Instruments, North America • 5 Harris Court, Building L • Monterey, California • (800) 866-0200 • (831) 373-0200 • Fax (831) 373-4402 • www.sierrainstruments.com Sierra Instruments, Europe • Bijlmansweid 2 • 1934RE Egmond aan den Hoef • The Netherlands • +31 72 5071400 • Fax: +31 72 5071401...