nn Pressure up to 5000 psig (333 barg) nn Ideal for OEM, industry or research applications nn True linear performance provides high accuracy and great flexibility in multiple gases nn With Dial-A-Gas® Technology, you select from up to ten pre-programmed gases or substitute your own nn Unique Pilot Module (mounted or hand-held) lets you view and change critical control functions nn All control functions are also available from your PC or workstation via supplied SmartTrak 100 software nn 316 stainless steel construction nn Small footprint and great flexibility facilitates replacement of older MFM or MFC nn Factory calibration done with primary standards directly traceable to NIST nn Proprietary frictionless-hovering direct-acting control valve technology nn Single-sided 24 VDC input power reduces installation cost and complexity nn CE approved nn Choose from multiple analog or digital signals including: RS-232, RS-485, 4-20 mA, 0-5, 1-5, 0-10 VDC nn Digital communications protocols supported nn Modbus nn Profibus DP nn Foundation Fieldbus nn Device Net (pending) nn Measure and control gas mass flow rates up to 1000 slpm High Performance Digital Gas Mass Flow Meters & Controllers martTrak® 100 Series features unprecedented performance, user-friendly features, and flexibility. The 100 Series gives users the world’s most linear sensor, smoother valve performance, more robust electronics and even more control over a wide range of functions. The result is a series of mass flow meters and controllers that demonstrates premium flow instrumentation which is easy to use. The 100 Series is designed so that the physics are correct. Excellent performance results from a patented, inherently linear Laminar Flow Element (LFE) design, advanced platinum sensor technology, and Sierra’s proprietary frictionless-hovering control valve. The 100 Series is available with an innovative and user-friendly Pilot Module, a front-mounted or hand-held control device that allows users to Dial-A-Gas, change flow rate, modify engineering units or re-configure the instrument. With the Pilot Module, the user can set zero, span, and full scale for each of the 10 different gases independently to accommodate unexpected application or system design changes. For the ultimate in performance, flexibility and value, SmartTrak is the smart choice.

PERFORMANCE SPECIFICATIONS Accuracy Standard: ± 1.0 % of full scale including linearity under calibration conditions (± 2.0 of full scale for 100M from 201-300 slpm) Standard Gas Pressure 500 psig (34.5 barg) maximum, burst tested to 750 psig (51.7 barg) Dial-A-Gas ± 1.0 % of full scale in all 10 standard gases (see chart below) High Pressure 5000 psig (333 barg) maximum, burst tested to 7500 psig (500 barg) Repeatability ± 0.2% of full scale Leak Integrity 5 X 10-9 atm cc/sec of helium or better Temperature Coefficient ± 0.025% of full scale per °F (± 0.05% of full scale per °C), or better...

Pressure Drop Across a Meter Pressure must be above the values in the table below. Note that pressure increases with flow rate. Note: Tested at 21°C, outlet at ambient pressure * Larger fittings recommended for these flow rates as 1/4 inch fittings reduce overall performance; N/A for high pressure version (flow is limited to 20 slpm)

Hand-Held Pilot Module PHYSICAL DIMENSIONS All dimensions are in inches with (mm) in brackets. Certified drawings are available on request.

PHYSICAL DIMENSIONS (continued) All dimensions are in inches with [mm] in brackets. Certified drawings are available on request. M100L & C100L Front View C100 High Pressure Front View C100 High Pressure Bottom View C100 High Pressure Inlet View

PHYSICAL DIMENSIONS All dimensions are in inches with [mm] in brackets. Certified drawings are available on request. M100H Front View

ORDERING THE SMART TRAK 100 Features Parent Instructions: To order a 100 please fill in each number block by selecting the codes from the corresponding features below and following pages. Parent Number M100 Mass Flow Meter, Digital High Performance with Multiple Gas Capability (Dial-A-Gas®) Mass Flow Controller, Digital High Performance with Multiple Gas Capability (Dial-A-Gas®) High Pressure Mass Flow Controller, Digital High Performance with Multiple Gas Capability (Dial-A-Gas®) Feature 1:Flow Body Size* M101 MicroTrak mass flow meter. Full scale flow = 4 sccm, range = 0.1 to 4.0 sccm MicroTrak...

ORDERING THE SMART TRAK 100 (continued) Feature 7: Output Signal Feature 8: External Setpoint Signals (MFC only) 0-5 VDC and 4-20 mA linear output signals (0-5 VDC not available with Compod) 1-5 VDC and 4-20 mA linear output signals Pilot Module/RS-232 (standard for Pilot Module/digital operation) 0-10 VDC and 4-20 mA linear output signals 0-5 VDC, linear, standard for analog operation (0-5 VDC not available with Compod) Feature 9: Electrical Connection C0 15-pin mating connector with no cable 10-foot (3 m) 100-Analog Cable. 15 conductor cable with D-connector on one end, fly leads on the other....