nn easure and Control Flow of Gas from 4 sccm M (smlm) down to 0.08 sccm (smlm) nn Digital performance nn Includes Dial-A-Gas® multi-gas capability that enables use with 10 different gases nn igital communications protocols supported D nn MODBUS nn Profibus DP nn Foundation Fieldbus (pending) nn Device Net (pending) nn ptional Compod Control Module for O programming of flow systems and process controls nn ll control functions are also available from your A PC or workstation nn 16 stainless steel construction suitable for any 3 clean gas, even corrosives and toxics nn Small footprint makes installation easy nn ingle-sided power input reduces installation S cost and complexity nn Every Micro-Trak Instrument includes: nn RS-232 Communication nn Analog communication Ultra Low Flow High Performance Digital Gas Mass Flow Meters and Controllers DESCRIPTION icroTrak™ measures and controls micro M mass flows of gas previously thought to be too low for a reliable reading. MicroTrak™ is specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.08 sccm (smlm). The Model 101 is a specialized and highly engineered instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics. MicroTrak™ is based on Sierra’s award-winning family of digital instruments. As a result, ease of operation, field configuration, multi-gas capability and application flexibility are standard features. nn Software for Windows OS nn Source code nn Calibration certificate nn Electrical Connector or Cable w w w.sier rainst r ument s .com The information contained herein is subject to change without n

DIGITAL COMMUNICATIONS PERFORMANCE SPECIFICATIONS Accuracy +/- 1% of full scale including linearity under calibration conditions Dial-A-Gas +/- 1% of full scale in all 10 standard gases Repeatability +/- 0.2% of full scale RS-232 standard, RS-485 optional Profibus DP Modbus Foundation Fieldbus OPERATING SPECIFICATIONS (CONTINUED) Temperature Coefficient +/- 0.025% of full scale per °F (0.05% of Full Scale per °C), or better Power Requirements (Ripple noise not to exceed 100mV peak-to-peak) For Mass Flow Meters:15 to 24 VDC +/- 10% (130 mA maximum) For Mass Flow Controllers: 24 VDC +/- 10% (400...

Instructions: To order a 101 please fill in each number block by selecting the codes from the corresponding features below and the following page. Parent Number M101 MicroTrak mass flow meter. Ultra Low-Flow Gas Mass Flow Meters & Controllers: Full scale flow = 4 sccm, range = 0.08 to 4.0 sccm MicroTrak mass flow controller. Ultra Low-Flow Gas Mass Flow Meters & Controllers: Full scale flow = 4 sccm, range = 0.1 to 4.0 sccm Feature 2: Pilot Module Display NR No display/interface. If option 2 digital communications are selected, NR must be selected. Pilot Module Display/Interface mounted on the...

ORDERING THE MICROTRAK 101 (CONTINUED) Feature 9: Electrical Connection C0 15-pin mating connector with no cable 100-Analog Cable (10 foot): 15 conductor cable with D-connector on one end, fly leads on the other. 10 foot length (3 m) 100-Analog Cable (1 foot): 15 conductor cable with D-connector on one end, fly leads on the other. 1 foot length (300 mm) 100-Analog Cable (25 foot): 15 conductor cable with D-connector on one end, fly leads on the other. 25 foot length (8 m) 100-Analog Cable (3 foot): 15 conductor cable with D-connector on one end, fly leads on the other. 3 foot length (1 m) 100-Analog...