FEATURES nn Direct monitoring of mass flow rate eliminates need for ancillary pressure and temperature sensing nn Stainless-steel flow body accommodates most corrosive and toxic gas applications nn Digital display of mass flow rate on flow body or in remote version for panel mounting nn Electronic output of mass flow rate for control or data-logging nn Large, straight sensor tube reduces contamination and maintenance down-time nn Platinum sensor eliminates zero drift and ensures long-term repeatability nn Primary standard calibration ensures starting point accuracy and NIST traceability Mass Flow Meters for Corrosive and Toxic Gases DESCRIPTION ierra Instruments' TopTrak™ 820S is designed for precise measurement of any process gas in ranges from 0 to 10 sccm to 0 to 500 slpm. Because all wetted materials are 316 stainless steel, the device accommodates most clean gases, including corrosives. The 820S measures and displays the mass flow rate directly in any user defined gas mass units. The instrument display is tiltable over 180° for easy viewing and can be removed for remote panel mounting. A 0 to 5 VDC or 4 to 20 mA linearly output signal proportional to gas mass flow rate is provided for recording, data-logging or control. TopTrak's outstanding accuracy is a function of a high-stability platinum flow sensor. This sensor has been continuously tested for over two years. The maximum deviation (drift) during that time was less than 0.5%. The sensor's large internal diameter also prevents the clogging and contamination often associated with capillary type thermal mass flow meters. TopTrak's broad range of sizes, electronics, process connections and input/output options provide flexibility, versatility and ultimately, the ideal instrument package for your specific application. w w w. s i e r r a i n s t r u m e n t s . c o m The information contained herein is subject to change without notice

MEDIUM FLOW BODY FLOW RANGE Process Tubing Fitting Type, .562-18 Thread(1) Compression .125 or .25 Process Tubing Note: (1) Metric fittings are available, consult factory. HIGH FLOW BODY All dimensions are inches. Millimeters are in parentheses. Certified drawings are available on request.

Mass Flow Rates 0 to 10 sccm to 0 to 500 slpm; flow ranges specified are for an equivalent flow of nitrogen at 760 mm Hg and 21°C (70°F); other ranges in otherunits are available (e.g., scfh or nm3/h) PERFORMANCE SPECIFICATIONS Accuracy ± 1.5% of full scale under calibration conditions including linearity over 15° to 25°C and 5 to 60 psia (0.3 to 4 bara) Gas Pressure 500 psig (34 barg) maximum; For pressures > 500 psig (34 barg), consult C100/M100 HP SmartTrak 30 psig (2 barg) optimum If the meter is mounted with a vertical (up or down) flow path the folowing accuracy de-rating applies: Operating...

ORDERING INFORMATION Features Instructions: To order a 820S/840 please fill in each number block by selecting the codes from the corresponding features below and following pages. Parent Number 822S Top-Trak® Mass Flow Meter with Display. Flow body and sensor constructed of 316 stainless steel, Viton® "O"-rings. 3.5 digit LCD display. Linear, 0-5 VDC output signal; input power 12-15 VDC. 9 Pin "D" mating connector and 1/4-inch fitting. Calibrated for flow ranges from 0-10 sccm to 0-500 slpm equivalent nitrogen flow; 1.5% full scale accuracy; maximum temperature 122°F (50°C); maximum pressure 500...