3D Field Solver for Parasitic Extraction Benefits • Highest Extraction Accuracy— Integrated capacitance field solver delivers reference-level accuracy with deterministic results. Calibre xACT 3D extracts complex context-sensitive device and interconnect parasitic effects needed to accurately predict circuit behavior. • Reliable Results—Calibre xACT 3D accurately handles close spacings, rotations, and symmetry without accuracy penalty or uncertainty typical of statistical field solvers, which is crucial for sensitive designs. Calibre xACT 3D provides a complete parasitic extraction solution with deterministic field solver accuracy, process variation modeling, electrically aware reduction, and industrystandard netlist formats, all within the design environment. Calibre xACT 3D—The Next Generation Fast Field Solver Parasitic Extraction Solution Process technology innovation is the key to success in the competitive IC design market. Cutting-edge development enables advances such as smaller geometries, increased metal stacks, new device types, and chip stacking. This new technology allows breakthroughs in IC design, but poses challenges at each stage in the design process. Success depends to a large part on a parasitic extraction tool that can model the new complex process effects with the highest accuracy. This solution needs to fit into existing design flows to speed up design cycle time and needs to be scalable for a wide range of design applications. Calibre® xACT 3D features a field-solver modeling engine built on advanced computational electromagnetic methods to accurately calculate device and interconnect parasitics. In contrast to other field solvers that use statistical methods, the Calibre xACT 3D engine employs deterministic techniques that produce reliable results for total and coupling capacitances while providing fast and scalable performance. • Fast Performance—Proprietary BEM/FEM-based field-solver technology delivers accurate results sooner. Multi-threaded and distributed processing ensures virtually unlimited design scope with fast, scalable performance comparable to rule-based extraction. • Easy-to-Use—Like all Calibre products, Calibre xACT 3D uses standard SVRF rule files and produces standard parasitic netlist formats. The graphical user interface for design environments speeds setup and debugging cycles. • Zero-Risk Investment and Superior Quality—Calibre xACT 3D is integrated with Calibre nmLVS and the Calibre Physical Verification Platform to provide trusted device recognition, connectivity extraction, and ease-of-use in existing customer sign-off flows.

In the die-stacking approach, TSVs (throughhole silicon vias) pass signals between dies. Capacitance-coupling effects from die-to-die must be accounted for. Only field solvers can provide the accuracy required. The close proximity of geometries exacerbates Calibre xACT 3D provides highly accurate transistor-level the need to model device extraction of parasitic effects and results at speeds an order of area capacitance based magnitude faster than existing field solvers. on the layout context. As a consequence, more Process Modeling Accuracy parasitic effects are moved out of the device models...