Calibre LFD Improving design robustness, reliability and yield Benefits • Improves design robustness, product reliability, and manufacturing yield • Minimizes feature variability and sensitivity to manufacturing process variations. • Results are presented in userfriendly DRC-style that can be classified and sorted within the design environment. • Model-based hints and results comments guide designers through layout improvements. • Part of the Calibre Design for Manufacturing solution, which also Litho-friendly design Designers adopt design for manufacturing (DFM) techniques with the goal of improving design robustness, product reliability, and manufacturing yield. For any DFM recommendation to be of value to designers, it must provide an accurate prediction of how a particular design will manufacture under various expected sets of process conditions. This predictive capability requires an awareness of the process window at all stages of the design flow. Litho-friendly design (LFD) captures information on how a design will respond to lithographic process window effects during manufacturing. This knowledge enables designers to improve and refine the layout, making a design significantly less sensitive to process window variations. Calibre LFD functionality The Calibre® LFD™ design checking tool performs three important tasks: • Gathers data about how the design will print at a range of conditions (such as dose, focus, and mask bias), not just at the optimal settings • Predicts specific failures or potential yield inhibitors • Assigns a manufacturability score to Open connection Line end pullback Minimum overlay error Double patterning overlay misalignment Reliability and performance problem Minimum width check The Calibre LFD tool simulates process variation bands and predicts failure in common configurations, including pinching, bridging, area overlap, and critical dimension variability.

includes analysis, enhancement, and diagnostics for design, manufacturing, and test areas. Features • Lithography effects are simulated using product-proven RET recipes and process models. • Foundry-supplied LFD process kit predicts and captures areas of potential design failure related to manufacturing process conditions. • Identifies issues and provides fixing hints to the designer for optimized layout modifications. each portion of the design, reflective of how well that portion will manufacture given the specific process window Data about the layout and its likely response to manufacturing...

Create design or cell Run design or cell through LFD checks to discover any errors Check the variability scores to see which errors are most critical design rule checking (DRC) results are presented, with data that can be classified and sorted within the design environment. The data also include comments for possible solutions. As designers gain experience using the Calibre LFD tool, they learn what design elements respond most favorably to manufacturing processes. In time, this knowledge enables users to design in preventive mode—that is, naturally practicing manufacturing process-aware design....