• Mass flow & controllers • Microfluidics • Pressure • Gas/chemical

The Company Established in 2004, Siargo is dedicated to MEMS sensing technology and related products. Current products shipped worldwide address the demands in the medical, city gases, automation, instrumentation, and semiconductor equipment markets. The product portfolios include flow, microfluidic, pressure, chemical sensors, and related modules and system products enabled with loT. Our global technical team is ready to provide timely solutions to even the most specialized requirements. Our patented low-power thermal sensing (time-of-flight and Therma-D) technology is a game-changer for current...

The products are manufactured with Siargo’s proprietary MEMS sensing technologies. Combined with packaging and electronics, these products, featuring mass flow, pressure, and chemical sensors/meters, as well as IoT-ready systems, offer unique performance tailored for multidisciplinary industrial applications. Siargo has been dedicated to developing state-of-the-art MEMS sensors, its packaging technology, and related system-level products, aiming to enhance product performance, functions, and reliability. Our sensors focus on the innovative integrations and product performance that enable various...

Contents Mass flow sensors FS1015E 1 Mass flow meters Mass flow meters with manual control Smart city gas/LPG applications Pressure sensors and transducers Microfluidic and liquid applications Medical devices

The FS1015E series mass flow sensors are specially designed for medical equipment gas flow monitoring and control applications. They are manufactured with Siargo's proprietary MEMS Thermal-D sensing chip, which captures thermal transfer data of the flow medium in both the space and time domains. The sensors directly measure mass flow with minimal pressure loss. The current models can be readily applied to ventilators, endoscopes, and anesthesia equipment. FS1015E can measure a flow up to 150 SLPM. The ISO 15 mm medical connection is designed for seamless plug-and-play compatibility with medical...

Gas Mass Flow Sensors – FS1015E series Specifications Flow range Response time Power supply Linear, Analog: 0.5 ~ 4.5 Vdc / Digital: I2C Output Pressure loss (max.) Pressure rating Mechanical connection 5 pins, AMPMODU MTE, or compatible Storage temperature Note: Parameters specified at the calibration conditions. Gas: A – air, N2, O2, and Ar; C – CO2. For other gases, please contact the manufacturer. Output: E – I2C; V – analog 0.5 ~ 4.5 Vdc. Option: V or EV. Connector: ISO – ISO-15mm; N – NPT ½”-male. Full scale flow rate: 100 or 150 SLPM; others optional. Note 1. For CO2, the max full-scale...

The FS1100 series mass flow sensors are manufactured with Siargo's proprietary MEMS Thermal-D sensing chip, which captures thermal transfer data of the flow medium in both the space and time domains. Compared to conventional calorimetric sensing, it offers significantly better linearity across the full dynamic range, eliminates gas sensitivities for gases with similar thermal diffusivities, and enhances measurement accuracy when used in conjunction with a gas conversion factor. It also simultaneously outputs the instant flow medium temperature data and improves the temperature performance of...

Gas Mass Flow Sensors – FS1100 series Specifications Flow range Accuracy (total error band) Response time Temperature range Temperature accuracy (0 ~ 50 °C) Power supply Linear, Analog: 0.5 ~ 2.5 Vdc / Digital: I2C Output Working temperature Temperature coefficient Pressure rating Warm-up time Analog null shift Note: Parameters specified at the calibration conditions: 20°C, 101.325kPa. Additional options. Gas: A – air, N2, O2, and Ar; C – CO2. For other gases, please contact the manufacturer. Forward flowrate: 100, 150, 200 or 250 SLPM. Reverse flowrate: 0, 50, 100, 150, 200 or 250 SLPM. Note...

The FS4001E series mass flow sensors are designed for instrumentation and process gas flow control, utilizing Siargo's proprietary MEMS mass flow sensors and smart electronic circuitry. The sensors directly measure mass flow at a sub-liter-per-minute flow range with high accuracy and a fast response time. The current models can also be configured with a small LCD. FS4001E can measure a full-scale flow ranging from as low as 30 sccm to 1000 sccm. The barbed connector is easily connected to a soft tube. • MEMS thermal mass flow rate • Excellent rangeability of 100:1 with integrated multiple sensing...

Flow range Accuracy Repeatability Response time Power supply Output Pressure loss (max.) Pressure rating Temperature Humidity Mechanical connection Storage temperature Hose coupling (Barbed) Note: Parameters specified at the calibration conditions. For other gases, please contact the manufacturer. - Full scale flow rate: 30, 100, 200, 500 or 1000 sccm. Note: For CO2, the max full-scale flow rate is 750 sccm.

Gas Mass Flow Sensors – FS4308 series Gas Mass Flow Sensor Production description The FS4308 series mass flow sensors are designed for general-purpose, precise gas metering, processing, monitoring, and/or control. The products are the third generation of the series, offering enhanced flow conditioning for greater flexibility during installation, including manifold options. FS4308 also has a smaller footprint compared to its former design. It has been applied to medical equipment, pneumatic control, process automation, and other industrial applications. The series offers a wide dynamic flow range,...

Gas Mass Flow Sensors – FS4308 series Specifications Flow range Response time Power supply Output Pressure rating Mechanical connection 5 pins, AMPMODU MTE, or compatible Max. overflow Max. flow change Weight Storage temperature SLPM SLPM/sec Note: Parameters specified at the calibration conditions. Gas: A – air, N2, O2, and Ar; B – N2O; C – CO2. For other gases, please contact the manufacturer. Output: B – RS485; C – RS232; E – I2C; V – analog 1 ~ 5 Vdc. Option: V, BV, CV or EV. Connector: R – BSPT ¼”; O4/O6/O8 – one touch; X – customized. Full scale flow rate: 2, 3, 4, 5, 10, 20, 30, 40 or...