Gas Mass Flow Controller – MFC5100M series Gas Mass Flow Controller Production description The MFC5100M series of gas mass flow controllers is designed for non-corrosive gas flow control applications, with a full-scale mass flow rate of up to 100 Ln/min. The product features a touchscreen that allows users to perform the basic functions. RS485 Modbus interface is also offered. Other standard communication options, such as DeviceNet, ProfiNet, EtherNet, EtherCat, IO-Link, etc., are available by contacting the manufacturer and will become standard offers in due course. These interfaces can also be further customized upon request. MEMS thermal calorimetry with diffusivity (Thermal-D ®) Extended dynamic control range Touch screen for on-site display and basic function programming Optional standard industrial bus protocols Mechanical dimensions

0 ~ 1, 2, 5, 10, 20, 50, iooLn/min ± 1.0% (20 ~ 100% of full scale), ±0.2%FS (<20% of full scale) ± 0.3% (20 ~ 100% of full scale), ±0.06%FS (<20% of full scale) Full-scale range Turn-down ratio Control pressure range Maximum operating diff. Pres. Setpoint source (input signal) Control time (typical) Working temperature Humidity Burst pressure Max pressure loss External leakage rate (He) Power supply Electrical connector Mechanical connection Reference conditions Analog: 0 ~ 5 Vdc or 4 ~ 20 mA Digital: RS485 Modbus or Compression tube fitting 1/8" ~ 1/4", 03 ~ 08mm 0 °C, 101.325 kPa, air Note:...