© 2021 Siargo Product Datasheet MEMS Mass Flow Meters With thermal time-of-flight sensing MF5900 series mass flow meters are designed for general purpose flow metering and control applications and are made with Siargo's proprietary MEMS thermal time-of-flight sensing technology and smart electronic circuitry. The meters will measure mass flow while having very high sensitivity at low flow, meter selective gases without requiring the gas transfer data. The current models allow the user to program various functions and can be readily applied to low flow natural gas and process metering, and other process control applications. MF5900 can measure a flow up to 5000 SLPM with a 2” pipe. The connectors can be customized. Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 [email protected]

Gas Mass Flow Meters – MF5900 series Specifications Flow range Response time Power supply Pressure rating Temperature Mechanical connection Storage temperature Note: Parameters specified at the calibration conditions. Product and order selection MF59 - Gas: A – air; C – CO2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer. Output: A – 4~20mA; B – RS485. Connector: N – NPT-F; B – BSPP-F; X – customized. Full scale flow rate: 600…1000(5925) / 2000…4000(5950). DN: 25 – 1”(25mm); 50 – 2”(50mm); others please specify. Note: For CO2, the full-scale flow rate is 90% of air....