© 2021 Siargo Product Datasheet MEMS Mass Flow Meters With calorimetric sensing MF5600 series mass flow meters are designed for general purpose flow metering and control applications where a detachable meter heat is required for some distance data reading. The meters directly measure mass flow with a very low pressure loss. The current models can be readily applied to hospital oxygen delivery management, and industrial process monitor and gauge; and other applications such as welding gas equipment, and food and beverage process. MF5600 can measure a flow up to 800 SLPM. The connectors can be fully customized. Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 info@Siargo

MEMS Mass Flow Meters – MF5600 series Specifications Flow range Initial flow rate Accuracy Power supply Pressure rating Mechanical connection LCD cable / data cable Storage temperature Note: Parameters specified at the calibration conditions. Gas: A – air; C – CO2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer. Display: D – LCD; N – no display. Output: A – 4~20mA; B – RS485; D – Pulse. Full scale flow rate: 200 / 300 (5612); 600 / 800 (5619). Connection: N – NPT; X – Customized. DN: 12 – 5612; 19 – 5619. Note: 1. For CO2 and N2O, the full-scale flow rate is 80% of air....