© 2021 Siargo Product Datasheet MEMS Mass Flow Meters With precision control valve MF5100V series mass flow meters are designed for flow metering and control with mobile power applications and are made with Siargo's proprietary MEMS low power mass flow sensors and smart electronic circuitry. The meters directly meter and control the mass flow with a very precise manual control valve. The current models can be readily applied to regulate such as gas cylinder delivery for medical purposes on an ambulance or other cases where direct power is not available. Other applications include laboratory and pharmaceutical process control. MF5100V can measure a flow up to 50 SLPM. The connectors can be fully customized. Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 [email protected]

MEMS Mass Flow Meters – MF5100V series Specifications Flow range Response time Power supply Battery life Pressure sensitivity Pressure rating Mechanical connection Storage temperature Note: Parameters specified at the calibration conditions. Gas: A – air; B – N2O; C – CO2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer. Output: B – RS485; V – analog. Connector: R – BSPT-F; N – NPT-F; X – customized. Full scale flow rate: 2…50 DN: 02 ... 08 Note: For CO2 and N2O, the full-scale flow rate is 80% of air. © 2021 Siargo. The company reserves the rights to change the product...