© 2021 Siargo Product Datasheet MEMS Mass Flow Meters With large dynamic range MF5100 series mass flow meters are designed for a large dynamic range (200:1) and high accuracy of 1.5% of reading in flow metering and control applications. With Siargo's proprietary MEMS mass flow sensing technology, the meter can automatically recognize the registered gases and be powered with a lithium-ion battery for long-lasting operation. The current models can be readily applied to applications with multiple gas process control and flow efficiency calibration, as well as applications requiring mobile power. MF5100 can measure a flow up to 100 SLPM. The connectors can be fully customized. Note: The current three models have the identical mechanical dimensions. Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 [email protected]

Gas Mass Flow Meters – MF5100 series Specifications Flow range Initial flow rate Response time Long term stability Power supply Battery life Output* D-Cell 19Ah lithium ion / 8~24 Vdc (external) >2 Pressure rating Burst pressure Humidity Pin-out Mechanical connection Calibration Weight Storage temperature Note: 1. Parameters specified at the calibration conditions. 2. RS485 Modbus / pulse output requires an external power model. 4~20mA and voltage output are optional. © 2021 Siargo. The company reserves the rights to change the product specifications without the prior notice. For further information,...