© 2021 Siargo Product Datasheet MEMS Mass Flow Meters With calorimetric sensing MF5000 series mass flow meters are designed for general purpose flow metering and control applications and are made with Siargo's proprietary MEMS mass flow sensing technology and smart electronic circuitry. The meters directly measure mass flow with a very low pressure loss. It has a wide spectrum of selections in pipe diameter, range, gas type, etc. The current models can be readily applied to industrial gas process and control, gas; and other applications in laboratory and test benches MF5000 can measure a flow from 0.15 up to 800 SLPM. The connectors can be fully customized. Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 [email protected]

Flow range Accuracy Repeatability Power supply Pressure rating Hazardous rating Note: Parameters specified at the calibration conditions. Gas: A – air; C – CO2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer. Output: A – 4~20mA; B – RS485; D – pulse (0~5Vdc) Connector: N – NPT; B – BSPT; X – Customized Full scale flow rate: 1.5 … 800 SLPM Ex proof: E – enabled; e – disabled. DN: 03 – MF5003 / 06… / 08… / 12… / 19 – MF5019 Note: 1. For CO2, the full-scale flow rate is 80% of air. 2. For explosion-proof models, the LCD / display is not offered. 3. The default flow range...