© 2021 Siargo Product Datasheet MEMS Mass Flow Meters With calorimetric sensing MF4700 series mass flow meters are designed for general purpose flow metering and control applications and are made with Siargo's proprietary MEMS mass flow sensing technology and smart electronic circuitry. The meters directly measure mass flow with a very low pressure loss. It is a replica of the MF4000 but with a higher pressure rating, excellent for industrial process monitoring with remote data. The current models can be readily applied to industrial gas process and control, gas; and other applications in laboratory and test benches MF4700 can measure a flow up to 300 SLPM. The connectors can be fully customized. Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 [email protected]

Flow range Accuracy Repeatability Power supply Pressure rating Note: Parameters specified at the calibration conditions. Gas: A – air; C – CO2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer. Output: V – Analog B – RS485 Full scale flow rate: 0.01 … 800 SLPM Connector: N – NPT; B – BSPT; X – Customized DN: 01, 03, 08, 10, 12, 19 Full scale (SLPM) 0.5 5.0 Full scale (SLPM) 50.0 100.0 Full scale (SLPM) 300.0 800.0 Note: 1. The above table shown are full scale range, the ranges within the full scale can be ordered as a customized range. For CO2, the full-scale flow rate...