Mass flow controller 2000

Product catalog summary

Overview: The Siargo MFC2000 is a mass flow controller designed for non-corrosive gas-flow control applications. It supports full-scale mass flow rates from 50 sccm to 200 SLPM, offering high accuracy and fast control time. The device is equipped with analog and RS485 Modbus interfaces, with additional interfaces available upon request.

Applications: The MFC2000 is suitable for various applications including bio-reactors, carrier gas, thin film deposition, gas mixing, fermentation, fuel efficiency, leakage testing, packaging processes, air quality management, purging and venting, and anesthesia gas.

Specifications:

Full-scale range: 0 ~ 50 mLn/min to 0 ~ 5000 mLn/min; 0 ~ 1 to 0 ~ 200 Ln/min
Accuracy: ±1.0% r.d. (20 ~ 100% of full scale), ±0.2% f.s. (<20% of full scale)
Repeatability: ±0.3% r.d. (20 ~ 100% of full scale), ±0.06% f.s. (<20% of full scale)
Turn-down ratio: 100:1
Control pressure range: 0.1~0.8 MPa (<20 Ln/min), 0.1~0.7 MPa (50…200 Ln/min)
Maximum operating differential pressure: 0.4 MPa
Settling time: 100 msec
Working temperature: 0 ~ 55 °C
Humidity: <95% RH, no condensation
Burst pressure: 1.5 MPa
External leakage rate: ≤1 x 10^-9 (He) Pa·m³/s
Power supply: 12 ~ 24 Vdc, 1A
Output signal: Analog: 0~5 Vdc or 4~20 mA; Digital: RS485
Control valve: Normally Closed (NC)
Mechanical connection: 7/16-20UNF…9/16-18 UNF, Compression tube fitting 1/8”~1/2”, or VCR 1/4”~1/2”
Protection: IP40
Storage temperature: -20 ~ +70 °C
Fluid compatibility: Non-corrosive
Compliance: CE EN61000-2; -3; -4, RoHS, REACH

Mechanical and Electrical Interfaces: The MFC2000 features mechanical connections including NPT, VCR, UNF, and compression fittings. Electrical interfaces include voltage, 4~20 mA, and RS485 Modbus, with other bus interfaces available.

Product Selection and Order: For product selection and ordering, contact Siargo Ltd. at their Santa Clara, CA office.

Catalog excerpts

> Thin film deposition Model MFC2000 The products are designed for general-purpose, non-corrosive gas-flow control applications, with full-scale mass flow rates from 50 sccm to 200 SLPM. It features high accuracy and fast control time. Analog and RS485 Modbus interfaces are both offered. Other interfaces can also be requested. Flow direction Controller body Wire Color Definition 4 Yellow Setpoint, analog o - 5 Vdc 6 Gray Flow rate output, o - 5 Vdc 7 Brown Power supply, (12 - 24) Vdc, 1A Siargo Ltd. 4677 Old Ironsides Drive, Suite 310, Santa Clara, CA 95054 +1 (408) 969.0368 [email protected] www.Siargo.com

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Siargo Product Datasheet Model: MFC2000 Mechanical dimensions Bio-reactors Carrier gas Thin film deposition Gas mixing Fermentation Fuel efficiency Leakage testers Packaging process Air quality Purging and venting Anesthesia gas Mechanical connections NPT VCR UNF Compressions Electrical interfaces Voltage 4~20 mA RS485 Modbus Other Bus interfaces 200 SLPM 4677 Old Ironsides Drive, Suite 310, Santa Clara, CA 95054 +1 (408) 969.0368 info@siargo

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Siargo Product Datasheet Model: MFC2000 Specifications Value Full-scale range Repeatability Turn-down ratio Max control range Bio-reactors Carrier gas Thin film deposition Gas mixing Fermentation Fuel efficiency Leakage testers Packaging process Air quality Purging and venting Anesthesia gas 0 ~ 50 mLn/min … 0 ~ 5000 mLn/min 0 ~ 1 … 0 ~ 200 Ln/min ± 1.0% r.d. (20 ~ 100% of full scale) ±0.2% f.s. (<20% of full scale) Control pressure range Maximum operating differential pressure Setpoint source (input signal) Settling time (typical) Working temperature Humidity Burst pressure External leakage...

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The product part number consists of the product model number and suffixes indicating the full-scale flow rate and other parameters. Referto the following for details. > Thin film deposition for other gases, please contact the manufacturer.) Default setpoint source (o - analog; 1 - digital) Setpoint source and output - Digital (B - RS485) and Analog (A - 4-20 mA; V - o - 5 Vdc). Selectable: BA or BV Mechanical connection, see Table 6.1. (For other connection (BSPT, etc.), please contact the manufacturer.) Maximum full-scale flow rate, see the table below. Maximum full-scale flow rate and mechanical...

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Siargo Product Datasheet Model: MFC2000 Product selection and order Bio-reactors Carrier gas Thin film deposition Gas mixing Fermentation Fuel efficiency Leakage testers Packaging process Air quality Purging and venting Anesthesia gas 4677 Old Ironsides Drive, Suite 310, Santa Clara, CA 95054 +1 (408) 969.0368 info@siargo

Open the catalog to page 5

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