© 2021 Siargo Product Datasheet MEMS Microfluidic Meters With thermal time-of-flight sensing LF6000 series microfluidic flow meters and sensors are designed for general-purpose microfluidic flow metering and control applications and are made with Siargo's proprietary MEMS thermal time-of-flight sensing technology and smart electronic circuitry that offers excellent reliability and rangeability. The current models can be readily applied to medical, bioscience, health care, pharmaceutic process, fuel cells, and many others. Disposable options are available upon contacting the manufacturer. LF6000 can measure a flow from 500 nL/min up to 50o mL/min (sccm). Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 [email protected]

MEMS Microfluidic Meters – LF6000 series Specifications Flow range Response time Power supply Pressure rating Temperature Linear: 0.5~4.5 Vdc / Digital: I2C / IO-Link Mechanical connection Wetted materials PEEK, SiNx, Stainless steel Storage temperature Note: Parameters specified at the calibration conditions. Medium: W – water; A – IPA; M – Methanol; X – customized (please contact the manufacturer. Wireless: B – Bluetooth; L – LoRa; N – null. Output: V – analog; A – 4~20mA; B – RS485; E – I2C. Connection: U – ¼”-28; C – compression; X- customized. Full scale range: …05 / …50 / …500 + M: meter;...