© 2021 Siargo Product Datasheet MEMS Integrated Sensors Multi-parameter sensing FS6100 series mass flow sensors offer a unique solution for multi-parameter flow measurement with mass flow, gauge pressure, temperature, and humidity. It is designed for industrial process measurement and can also be applied for general purpose flow metering and control applications, such as compressed air where high flow rate data are required. The current models can be readily applied to food and beverage processes, industrial air management, and many process control applications. FS6100 has a pressure rating over 1.o MPa and opted with gas concentration measurement for two gas mixture. With a 50 mm (2”) diameter, it can measure up to 10000 SLPM air. Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 [email protected]

MEMS Multi-parameter Sensors – FS6100 series Specifications Flow Accuracy Pressure Temperature Range Accuracy Humidity* Humidity response Other response time Compensation range Power supply Output Mechanical 6 pins, AMPMODU MTE, or compatible Storage temperature Note: Parameters specified at the calibration conditions. For detailed specifications, refer to the manual. Humidity sensing may require long sensing stable time, not recommended for nonessential applications. Product and order selection FS61 Gas: A – air; C – CO2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer....