FS5200 Series
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© 2021 Siargo Product Datasheet MEMS Mass Flow Sensors With calorimetric sensing FS5200 series mass flow sensors are designed for general purpose flow metering and control applications and are made with Siargo's proprietary MEMS mass flow sensors and smart electronic circuitry. The sensors directly measure mass flow with a very low pressure loss. The current models can be readily applied to oil and gas process monitor, leakage detection; and other applications such as an alternative to the bubble flow meter. FS5200 can measure a flow down to 0.2 sccm and up to 300 SLPM. The connectors can be fully customized. Dimensions 20sccm full scale model Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 info@Siargo.com

MEMS Mass Flow Sensors – FS5200 series Specifications Flow range Response time Power supply Linear analog: 0.5~4.5 Vdc / Digital: I2C Output Pressure loss (max.) Pressure rating Temperature Mechanical connection Storage temperature Note: Parameters specified at the calibration conditions. Gas: A – air; C – CO2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer. Connector: N – NPT; B – BSPP; X – customized. Full scale flow rate: 002 … 300 DN: 01 – 1mm; 12 (1/2”), or customized. Note: For CO2 and N2O, the full-scale flow rate is 80% of air. © 2021 Siargo. The company...