FS5200 Series

Product catalog summary

Overview
The FS5200 series mass flow sensors are designed for general-purpose flow metering and control applications. They utilize Siargo's proprietary MEMS mass flow sensors and smart electronic circuitry to directly measure mass flow with minimal pressure loss. These sensors are suitable for applications such as oil and gas process monitoring, leakage detection, and as an alternative to bubble flow meters.

Specifications

Flow Range: 0.02 to 300 SLPM
Accuracy: ±(1.5+0.2FS) %
Repeatability: 0.25%
Response Time: 200 milliseconds
Power Supply: 8 to 24 Vdc (50mA)
Output: Linear analog (0.5 to 4.5 Vdc) / Digital (I2C)
Pressure Loss (Max): 0.03 kPa at 0.02 SLPM
Pressure Rating: 1.0 MPa
Operating Temperature: -10 to 55 °C
Humidity: Less than 95% RH (no condensation)
Mechanical Connection: NPT or customized
Pin-out: SM05B-SRSS-TB (JST)
Calibration: Air at 20°C, 101.325 kPa
Weight: 350 g (SS304)
Storage Temperature: -20 to 70 °C

Product Selection
The FS5200 series offers customization options for gas type, connector type, full-scale flow rate, and diameter. For CO2 and N2O, the full-scale flow rate is 80% of air. Available gases include air, CO2, N2, O2, and Ar. Connectors can be NPT, BSPP, or customized, with full-scale flow rates ranging from 002 to 300 SLPM and diameters from 1mm to 1/2" or customized.

Catalog excerpts

© 2021 Siargo Product Datasheet MEMS Mass Flow Sensors With calorimetric sensing FS5200 series mass flow sensors are designed for general purpose flow metering and control applications and are made with Siargo's proprietary MEMS mass flow sensors and smart electronic circuitry. The sensors directly measure mass flow with a very low pressure loss. The current models can be readily applied to oil and gas process monitor, leakage detection; and other applications such as an alternative to the bubble flow meter. FS5200 can measure a flow down to 0.2 sccm and up to 300 SLPM. The connectors can be fully customized. Dimensions 20sccm full scale model Siargo Ltd. Santa Clara, California www.Siargo.com 408.969.0368 [email protected]

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MEMS Mass Flow Sensors – FS5200 series Specifications Flow range Response time Power supply Linear analog: 0.5~4.5 Vdc / Digital: I2C Output Pressure loss (max.) Pressure rating Temperature Mechanical connection Storage temperature Note: Parameters specified at the calibration conditions. Gas: A – air; C – CO2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer. Connector: N – NPT; B – BSPP; X – customized. Full scale flow rate: 002 … 300 DN: 01 – 1mm; 12 (1/2”), or customized. Note: For CO2 and N2O, the full-scale flow rate is 80% of air. © 2021 Siargo. The company reserves...

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FS5200 Series

FS5200 Series

Catalog excerpts

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