Catalog excerpts
Vacuum Climatic System To Become Your First Choice Test Chamber Provider
Open the catalog to page 1Vacuum Climatic System Basic Technical Specifications Main Features Vacuum processing with excellent pressure control Operating temperature: ambient to 450°C (optional high temperature version: ambient to 550°C Temperature uniformity: ± 5°C during dwell Laminar gas flow parallel to the wafers Pump and purge cycles to reduce O2: content Standard Configuration Faster process: 3.5 hours vs 8+ hours Laminar flow reduces/eliminates particles Less than 10ppm O2: concentration after 3 pump and purge cycles More complete cure (5x less outgassing) 1.6x to 2x less power and N: consumption 6. Much lower...
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