Microfocus X-Ray Inspection System

Microfocus X-Ray Inspection System

The Xslicer SMX-1010/1020 is a vertical emission X-ray system equipped with 90 kV microfocus X-ray generator and a high-resolution flat panel detector. Image quality has been significantly improved over the previous model (SMX-1000 Plus), and Shimadzu’ s renowned operability has advanced even further. In addition to operability improvements, the stage movement speed and detector acquisition speed have also increased, significantly shortening inspection times. The inspection process is now more efficient. The workflow has also been simplified for the CT unit (optionally available), and operability...

High Image Quality Exceeding the Level of General-Purpose Models Equipped with ultra-high-resolution 3 megapixel flat panel detector* *Xslicer SMX-1020 The Xslicer SMX-1020 is equipped with a 3 megapixel flat panel detector. Users can assess internal structures or defects in detail while observing a wide field of view. The Xslicer SMX-1020 can inspect sizes with twice the field of view as the SMX-1010. Detector Area Size Xslicer SMX-1010 imaging area Xslicer SMX-1020 imaging area X-Ray Fluoroscopic Image SMX-1000 Plus X-Ray Fluoroscopic Image Xslicer SMX-1010 X-Ray Fluoroscopic Image Xslicer...

Software Significantly Shortens Inspection Times Inspections Start in 3 Steps and 5 Seconds Just a 3-step process before starting observations. After the start button is clicked, X-ray emission and exterior camera imaging are automatic. X-ray fluoroscopic imaging can start 5 seconds after sample placement (4.6 times faster than the previous model). Replace the previous sample. The stage automatically moves to a position where it is easier to replace the sample. Unlocks the electromagnetic lock on the front door. Replace the previous sample. Click the start button. X-rays are emitted automatically....

Simple Operation Simple UI and Easy Positioning Operations A large monitor screen and simple button layout provide excellent visibility for intuitive operability. X-ray inspections can be performed easily, even by operators using the system for the first time. Stage Positioning via the Live X-ray Image Simply click on any point in an X-ray image to control all stage movements, such as changing the XY position, tilt, or field-of-view size. Using Exterior Images for Stage Positioning An observation camera provides a top-down view of the entire sample region. The user can alter the position of the...

Example of Continuous Inspections Using the Step Feed Function Inspection times were compared for consecutive X-ray inspections of 25 samples using the step feed function on the previous SMX-1000 Plus and the SMX-1020. Inspection times are approximately 40 % shorter in comparison to the SMX-1000 Plus. Additionally, X-ray emission times are reduced by at least 35 %, which also reduces running costs. The time reduction ratio increases as the number of samples increases. Exterior Image Acquisition Movement to the Start Position Movement to the Sample Replacement Position Samples arranged at fixed...

Diverse Functions Provide 3D Analysis with a Single Unit Simple CT Function with High Image Quality (Optionally Available) Simply position the compact CT unit on the fluoroscopic stage and switch the software tab to enable 3D analyses unobservable with fluoroscopic functions. There is no need to switch software programs, so CT imaging can start easily. Flat Panel Detector X-Ray Source Automated Calibration (Shorten the time for process before imaging by 80 %) Calibration has been automated, simplifying CT imaging. There is no need for calibration each time a sample is loaded as previously. Imaging...

Panoramic Imaging Function A wide X-ray fluoroscopic image can be obtained just by specifying the imaging range on the exterior image. An improved stitching process ensures a panoramic X-ray fluoroscopic image up to 32 megapixels in size can be obtained with no conspicuous marks where the images are spliced together. 300 mm Panoramic Image No Splicing (region enlarged) 32 Megapixel Panoramic Image Combined 9 × 10 images by Xslicer SMX-1020 Imaging Mode Panoramic Image Splicing (region enlarged) 300 x 350 mm Scanning time for entire range Equivalent to 2K (full HD) in size Approx. 2 million pixels...

BGA bump diameters and void ratios can be measured. With our proprietary image processing algorithm, complicated parameter settings are unnecessary.* Multiple settings can be saved and applicable ones can be accessed for each inspection target prior to measurement. * Manual adjustments may be required depending on the sample. (Measurable Items) • Total void ratio • Maximum void ratio • Bump diameter • Bump roundness Area Ratio Measurements Die bonds, solder paste wettability, and other area ratios can be measured. The parameter settings are not required thanks to Shimadzu's proprietary image...

Wire Sweep Ratio Measurements Point of Maximum Curvature The wire sweep ratio can be measured by specifying both ends of the bonding wire and the point of maximum curvature. Pass/fail determinations can be made depending on the wire sweep ratio. L2 L1 Wire Sweep Ratio = L2/L1 × 100 (%) Dimension Measurements The Xslicer SMX-1010/1020 supports both 2-point distance and 3-point measurements. With this system, sizes are measured ef ficiently by calculating calibration data internally in synchronization with the fluoroscopic magnification. Xslicer SMX-1010/1020 Microfocus X-Ray Inspection System

A Wealth of Functions for Facilitating Inspections Teaching Function Fluoroscopic and CT imaging can be automated using the Teaching Function, which moves the sample stage to preregistered points of interest. Additionally, for visual inspection, OK and NG judgment functions are included. Shortened Source-Detector Distance (SDD) Function The distance from the X-ray generator to the X-ray detector (SDD) can be switched to 185 mm (The standard distance is 370 mm) By shortening the SDD, images with sufficient penetration can be obtained even for samples that are hard to penetrate. Flat panel detector...