Infrared Film Thickness Monitor
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Sheet thickness monitor of the Infrared transmission absorption type Features Measures the thickness of translucent sheets, low-reflection films, silicon, etc., which was difficult with the optical interferometry *1 Compact probe By adopting a small 30 mm reflective probe, it can be installed in a small space in equipment or production lines. In addition, since the probe is connected to the main body only with an optical fiber cable, it has excellent environmental resistance. High speed measurement Simultaneous sampling of near-infrared wavelengths from 950 nm to 1600 nm at 100 points or more It enables to make rapid sampling with min 1mm sec. It enables to measure on production line at realtime basis. It is supeior for durability and consistency due to non impact filter use. Thickness measurement reproducibility 0.1% or less (3σ) Measurement algorithms Calibration sample Least squares regression method Multiple parameters (Thickness, Density, Composite ratio, etc) *1 It correspond to ceramic coating like inorganic material or plastic like organic material. *2 We recommend to take 1mm to 80mm distance from probe to target sample. Measurement range is about 3mmø.( It is possible to connect with 1mmΦ probe optionally) It is possible to take more than 100mm distance if changing probe kinds. *3 Material shall be used under below condition. Wavelength: 950-1600nm Transmittance: 5-9

Measurement example 1(Lithium ion battery separator) Simultaneous measurement of thickness and coating weight is possible 3 Regression coefficient of thickness Regression coefficient of coating weight Measurement example 1 (Black resist film thickness) Black resist film thickness measurement, which was difficult with reflection spectroscopy Regression coefficient for film thickness Configuration Mirror Optical fiber Application system Sheet sample (Authrized Dealer) Shashin Kagaku Co., Ltd. Product Company 7-2-10, Nojihigashi, Kusatsu City, Shiga, 525-0058, Japan TEL. +81-77-566-1208 FAX....