Royal Technology/PECVD deposition/ DLC by PECVD/R&D Laboratory
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Royal Technology Multi950 FVD+PEG/D Vacuum Deposition Machine Royal Technology Multi950 YcraHOBKa BaKyyMHoro HanbrneHna FVD+PEG/D •Compact Footprint • Flexible • Octagonal Chamber • FVD + PECVD processes • Standard Modular Design • Reliable • 2-door structure for easy access • KOMnaKTHblM MOHTa>K •rvfoKafl • BocbMkiyro/ibHan xaMepa • FVD + PECVD npoqeccbi ■ CiaH^apTHblM MOfly/IbHbIM flH3aHH ■ Hafle>KHan • 2-x flBepHan KOHcrpyKunn pjm nerKoro flpcryna The Multi950 machine is a customized multiple function vacuum deposition system for R&D. After intense exchanges with Shanghai University’s team lead by Professor Chen, we finally confirmed the design and configuration to fulfil their R&D applications. This system is able to deposit transparent DEC film with the PECVD process, hard coatings on tools, and optical film with sputtering cathode. Based on this pilot machine design concept, we have developed 3 other coating systems afterwards: 1. Bipolar Plate Coating for Fuel Cell Electric Vehicles- FCEV1213 2. Ceramic Direct Plated Copper- DPC1215 3. Flexible Sputtering System- RTSP1215 These 3 machines all have an Octagonal chamber, which allow flexible and reliable performances in various applications. It satisfies the coating processes and requires many different metal layers: Al, Cr, Cu, Au, Ag, Ni, Sn, SS and many other non-ferromagnetic metals. Plus the Ion source unit, efficiently enhances films adhesion on different substrate materials with its plasma etching performance and, the PECVD process to deposit some carbon-based layers. The Multi950 is the milestone of advanced design coating systems for Royal Technology. Thanks to students of Shanghai University and Professor Yigang Chen leading them with his creative and selfless dedication, were we able to convert his valuable information into a state of the art machine. In the year 2018, we had another project cooperation with Professor Chen, the C-60 material deposition by Inductive thermal evaporation method. Mr. Yimou Yang and Professor Chen were fundamental for these innovative projects. ycraHOBxa Multi950 npeflCTaanner go6om cne4nann3npoBaHHyro MHorocjryHKqMOHanbHyio cncreMy BaxyyMHoro Hanbi/ieHmr piisr McaieflOBaHMM n pa3pa6oTOK. nocne MHTeHCMBHoro o6MeHa MHem/isiMi/i c KOMaHflOM LllaHxaCkKoro yHMBepcuTeTa, B03maB/isreM0M npocjreccopoM HeHOM, Mbi, HaxoHeq, yTBepflnnn pyt3SMH n KOHcjsurypaquro ycraHOBKM piin Bbino/iHeHkin nx ucaieflOBaHMM h pa3pa6oTOK. Dm cncreMa cnooobHa HaHoenre npo3panHyro n/ieHKy DLC c noMOigbro npoqecca PECVD, TBepgbie noKpbiTnn Ha HHcrpyMeHTbi n onTHHecxyro nneHKy pacnbinmenbHbiM KaTOflOM. OcHOBbiBancb Ha Taxon KOHqenqnn KOHcrpyxqMM nn/iomon ycraHOBKki, Mbi pa3pa6orann erqe 3 cncreMbi noKpbiTnn: 1. EnnonnpHoe noKpbune nnacrnH ppn 3neKrpoMo6nneH Ha TonnkiBHbix aneMeHxax - FCEV1213 2. npsiMoe HaHeceHne Mefln Ha KepaMnxy - DPC1215 3. Tn6i<an cncreMa pacnbineHnn - RTSP1215 3th 3 ycraHOBKH nMeior BOCbMnyro/ibHyro KaMepy, Koropan o6ecne4HBaer ™6i<yro n HaflewHyro pa6cny ppa paannHHbix o6nacren npMMeHeHkin. Ohm yflOBnerBoprreT npoqeocaM HaHeceHnrr noKpbrmn h Tpebyer mhoto paannnHbix MerannnHecKHx cnoeB: Al, Cr, Cu, Au, Ag, Ni, Sn, SS m mhotmx flpyrnx HerjreppoMamHTHbix Mera/inoB. KpoMe Toro, 6nox mctohhmio mohob acjxjieKrMBHO y/iyniuaer aflre3nro nneHOK k paanHHHbiM MarepnanaM nognoKKn 6naroflapsr cbomm xapaKiepMCTMKaM nna3MeHHoro TpasneHnn m npoqeocy PECVD ppn HaHeceHMB Hexoropbix cnoeB Ha ocHOBe ymepoqa. YcraHOBKa Multi950 nannercn BaxtHbiM aranoM b pa3Bmnn nepegoBbix CMcreM HaHeceHMn noKpbrmn ppn KOMnaHMM Royal Technology. Bnaroflapn crygeHraM LLiaHxancKoro yHMBepcMrera h mx pyKOBOflMTenro npocfreccopy klraH HeHy, era TBopnecKon m caMOOTBepxreHHOM npeflaHHoern, Mbi CMornn npeBpamTb era qeHHyro MH(jx}pMaL|Mio b coBpeMeHHyio ycraHOBKy. B 2018 rapy y Hac 6bin eiqe oflHH npoercr corpyflHHHecrBa c npocjj. HeHOM, ocax<AeHMe Marepnana C-60 MeroflOM MH^yioviBHoro repMMHecKoro ncnapeHnn. T-h IriMoy Ah m ripocjreccop HeH 6binn ocHOBononoxtHMxaMM 3tmx MHHOBaqMOHHbix npoeKTOB.

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