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ECD Series

ECD Series
2Pages

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ISO9001:2015 Page 1 of 2 SEMICONDUCTOR E-CHUCK POWER SUPPLY -\ Output voltage range: 0~±3kVdc Output current 0~±6.5mAdc or peak capacity is 10 mA Lockable front panel control interface Traceable calibration certificate supplied with each unit Support Coulombic and Johnsen-Rahbek ESC technology Upload and store electrostatic chuck configuration files to the device Wafer detection including no wafer, wafer present or wafer clamped status __X Wisman's ECD series of software-driven electrostatic chuck power supplies offer a range of features to meet a wide variety of demanding applications. The instrument uses Wisman Amplifier technology that has been shown to increase efficiency and throughput up to three times that of other power supplies. Reduce backside gas errors, increase throughput, and eliminate Wafer sticking/popping issues; control parameters such as overcurrent, presence of wafer and wafer clamp threshold, clamp voltage, offset voltage and internal or external amplitude/Offset control; versatility of amplitude/offset and output control during adjustment; control using rear panel I/O, serial computer commands, or front panel controls Output; configure custom clamping and declamping sequences and waveforms. The versatile and reliable performance of Wisman's ECDs allows for a wide range of unique tools and processes use without adding new costs for each unique tool or process in your facility. Electrostatically driven material handling, semiconductor wafer processing, non-mechanical transfer of flat panels or other processed materials that are sensitive to mechanical handling. SELECTION EXAMPLE Sales@wismanhv.com 2014.2 Wisman High VoSbge Powe r Supyl y Corp. ■All Rights Reserved 020219

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ECD Series 2Pages

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ECD Series
2Pages