Model 760 VactronTM Series Capacitance Manometer - Absolute Pressure Transducer Gases Compatible with Inconel® or Inconel/Stainless Steel Absolute Pressures: 0 - 10 to 0 - 1000 Torr, 0 - 10 to 0 - 1000 mbar/hPa 0 - 2 to 0 - 20 psia, 0 - 2 to 0 - 100 kPa Semiconductor Process Tools and Equipment Laboratory and R&D Test and Measurement Metrology Analytical Chemistry Systems etra's Vactron Model 760 capacitance manometer is an absolute pressure transducer designed for accurate and repeatable vacuum measurements. Various full scale ranges are available from 10 Torr up to 1000 Torr. The units of measurement may be specified in Torr, mBar/hPa, kPa or psia. The Model 760 operates from a ±15 VDC power supply and provides a 0-10 VDC or 0-5 VDC signal output that is linear with pressure and independent of gas composition. The electrical connection can be either the industry standard 15 pin D-sub or 6 position terminal strip connector. Superior EMI/RFI performance is achieved by the use of a metal case, in conjunction with surge and ESD suppression components and RFI filtering on the inputs and outputs. The Model 760 has an integrated sliding cover that provides easy access to multi-turn potentiometers for fine zero and span adjustments. Inconel® is used for all wetted materials allowing the Model 760 to be used with corrosive gases. A wide range of pressure and vacuum fittings are available. The high accuracy pressure sensing element used in the Model 760 is the VactronTM sensor, which has been developed from Setra’s patented variable capacitance sensor. A centrally located feed-through assembly supports a circular electrode in close proximity to the back surface of the diaphragm. Together the electrode and diaphragm form a variable capacitor within a small reference vacuum chamber maintained at very low pressure. As the pressure increases, the diaphragm deflects and the gap between the electrode and diaphragm decreases, causing an increase in the capacitance. This change in capacitance is detected and converted to a highly accurate linear DC electronic signal by Setra’s unique custom integrated circuit, which utilizes a patented charge balance principle. Excellent zero stability and barometric insensitivity are achieved through an innovative sensor design. The Model 760 sensor contains no fragile or complex parts found in similar ceramic based capacitance manometers. Excellent Thermal Stability Superior EMI/RFI Performance Low Cost Small/Compact Size Inconel® Wetted Parts for Corrosion Resistance Various Fittings and Electrical Connections Meets CE Conformance Standards When it comes to a product to rely on - choose the Model 760. When it comes to a company to trust - choose Setra - an ESOP (Employee Owned) Company. Visit Setra Online: http://www.setra.com NOTE: Setra quality standards are based on ANSI-Z540-1. The calibration of this product is NIST traceable. Inconel is a registered trademark of Special Metal Corporation. Huntington, WV, USA. 159 Swanson Road, Boxborough, MA 01719/Telephone: 978-263-1400/Fax: 978-264-0292

Model 760 Specifications Performance Data Environmental Data Electrical Data Accuracy Code A Code B Thermal Effects Compensated Range °C(°F) Zero shift Span shift Resolution Temperature Operating* °C (°F) Storage °C (°F) Circuit Excitation Output* Power Consumption Proof Pressure Time Constant ±0.25% of reading ±0.15% of reading 0 to +50 (+32 to +122) ±0.005% FS/°C ±0.027% Rdg/°C Infinite, limited only by output noise level (0.01% FS) 45 psia <20 ms *Operating temperature limits of the electronics only. Pressure media temperatures may be considerably higher or lower. *Calibrated into a 50K ohm...