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SERVOPRO NanoTrace DF-750 ULTRA Product Brochure

SERVOPRO NanoTrace DF-750 ULTRA Product Brochure
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SERVOPRO NanoTrace DF-750 ULTRA Product Brochure - 1

Product overview Ultra High Purity Introducing our ultra series, a 55ppt tunable diode laser absorption spectroscopy (TDLAS) moisture analyzer for low linewidth semiconductor process Unrivalled performance SENSING TECHNOLOGY Laser Moisture Uses industry-leading, high stability tunable diode laser (TDLAS) trace sensing with zero drift New Solid State Hard Drive and CPU Industry-leading 55ppt Lower Detection Limit (LDL) Manufactured by Servomex 70 years’ experience pioneering gas analysis with thousands of units used in the field NanoTrace SERIES Bulk gas quality control checks for UHP electronic gases used in semiconductor fabs Improved uptime with TDLAS first principle physics methodology Laser lock system guarantees location of the moisture spectra peak High reliability - repeatable baseline measurements are not affected by a loss in mirror reflectivity Low cost of ownership Herriott Cell sensor design, the same as used in NASA’s Mars rovers Broad detection range: 0-20ppm Absence of zero drift reduces calibration requirements Storage and recall function: calibration, system error and measurement data facilitates archiving operational history Modular design allows individual component replacement in the field Operable via front panel or digital communication options Analysis resistant to gas cell contamination: DF-750 ULTRA operates to specification with up to 90% signal loss Benchmark compliance IEC 61010-1 Overvoltage Category II, Pollution Degree 2 EU EMC Directive EU Low Voltage Directive Class 1 laser product Leak detection checks for UHP electronic gases used in semiconductor fabs For more information visit servomex.com/contac

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SERVOPRO NanoTrace DF-750 ULTRA Product Brochure - 2

NanoTrace DF-750 ULTRA High stability TDL trace/ultra-trace measurements Introducing the Servomex ULTRA range of products, offering unparalelled performance for CQC analysis of UHP gases used in semiconductor wafer fabs. The DF-750 ULTRA offers improved performance over the DF-750, with improved signal processing algorithms. Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. You need a moisture analyzer that can deliver high stability measurements with sensitive and consistent performance. An accurate and low LDL is a must, as is the need to limit...

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SERVOPRO NanoTrace DF-750 ULTRA Product Brochure - 3

Technical data sheet SERVOPRO NanoTrace DF-750 ULTRA Tunable Diode Laser Absorption Spectroscopy (TDLAS) Performance Measurement range Lower detection limit Intrinsic error (accuracy) FS ±3% of reading / ±0.2ppb (whichever is greater) Zero drift/month Span drift/month Upset recovery time <5 minutes to return to within 10ppb of previous stable reading Signal outputs/inputs Analog output Analog output range Scalable to any range between 0-2ppb to 0-20ppm Visual alarms 4 moisture levels, temperature, system error, pressure range and hydrogen safety system (if applicable) Dual scale range 2...

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SERVOPRO NanoTrace DF-750 ULTRA Product Brochure - 4

Physical Size 483mm (19”) Wide x 266mm (10.5”) High x 631mm (24.9”) Deep (see drawing below) Standard aspirator connection 1/4” compression inlet and outlet fittings 19” rack mount NEMA 1 enclosure, IP10 Utilities Supply voltage Optional - recommended if operating near LDL Standard aspirator gas supply (gauge) N2 or CDA at 80psig (±3psig) 15l/min with a backpressure on outlet stream of <2psig This product complies with the EU EMC Directive, EU Low Voltage Directive, Pollution Degree 2. This is a class 1 laser product. Electrical safety Options Configuration options Power input 110 VAC input...

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SERVOPRO NanoTrace DF-750 ULTRA Product Brochure - 5

Dimensional drawings Dimensions shown in millimetres [inches]

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SERVOPRO NanoTrace DF-750 ULTRA Product Brochure - 6

We’re ready to help Whatever your gas analysis requirements, wherever you are. These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices legislation or regulation. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a...

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