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SERVOPRO NanoTrace DF-750 Product Brochure

SERVOPRO NanoTrace DF-750 Product Brochure
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SERVOPRO NanoTrace DF-750 Product Brochure - 1

Product overview High Purity Tunable diode laser absorption spectroscopy (TDLAS) trace/ultra-trace moisture measurements for continuous quality control in semiconductor fabs Unrivalled performance Gas Uses industry-leading, high stability TDLAS trace sensing with zero drift Improved uptime with TDLAS first principle physics methodology New Solid State Hard Drive and CPU Laser lock system guarantees location of the moisture spectra peak 100ppt Lower Detection Limit (LDL) SENSING TECHNOLOGY Laser Moisture Manufactured by Servomex 70 years’ experience pioneering gas analysis with thousands of units used in the field Flexible Broad detection range: 0-20ppm NanoTrace SERIES Storage and recall function: calibration, system error and measurement data facilitates archiving operational history Operable via front panel or digital communication options Key applications Bulk gas quality control checks for UHP electronic gases used in semiconductor fabs Analysis resistant to gas cell contamination: DF-750 operates to specification with up to 90% signal loss High reliability - repeatable baseline measurements are not affected by a loss in mirror reflectivity Low cost of ownership Herriott Cell sensor design, the same as used in NASA’s Mars rovers Absence of zero drift reduces calibration requirements Modular design allows individual component replacement in the field No consumables required Benchmark compliance IEC 61010-1 Overvoltage Category II, Pollution Degree 2 EU EMC Directive EU Low Voltage Directive Class 1 laser product Leak detection checks for UHP electronic gases used in semiconductor fabs For more information visit servomex.com/contac

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SERVOPRO NanoTrace DF-750 Product Brochure - 2

NanoTrace DF-750 High stability TDLAS trace/ultra-trace measurements Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. You need a moisture analyzer that can deliver highly accurate measurements sensitive to perturbations, but limits false positive disrupting production. The lowest LDL is a must, as is the need to easily identify trends and recall graphs in real time. You need a moisture analyzer that can deliver highly accurate measurements and is sensitive to perturbations, but limits production-disrupting false positives. A no compromise...

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SERVOPRO NanoTrace DF-750 Product Brochure - 3

Technical data sheet Tunable Diode Laser Absorption Spectroscopy (TDLAS) Performance Measurement range Lower detection limit Intrinsic error (accuracy) FS ±3% of reading / ±0.2ppb (whichever is greater) Zero drift/month Span drift/month Upset recovery time <5 minutes to return to within 10ppb of previous stable reading Signal outputs/inputs Analog output Analog output range Scalable to any range between 0-2ppb to 0-20ppm Visual alarms 4 moisture levels, temperature, system error, pressure range and hydrogen safety system (if applicable) Dual scale range 2 user selectable analog output...

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SERVOPRO NanoTrace DF-750 Product Brochure - 4

Physical Size 483mm (19”) Wide x 266mm (10.5”) High x 631mm (24.9”) Deep (see drawing below) Standard aspirator connection 1/4” compression inlet and outlet fittings 19” rack mount NEMA 1 enclosure, IP10 Utilities Supply voltage Optional - recommended if operating near LDL Standard aspirator gas supply (gauge) N2 or CDA at 80psig (±3psig) 15l/min with a backpressure on outlet stream of <2psig N2 or CDA 60 to 100psi, 4.14 to 6.89 Bar, 413.7 to 689.5 KPa (Isolation panel option) This product complies with the EU EMC Directive, EU Low Voltage Directive, Pollution Degree 2. This is a class 1...

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SERVOPRO NanoTrace DF-750 Product Brochure - 5

Dimensional drawings Dimensions shown in millimetres [inches]

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SERVOPRO NanoTrace DF-750 Product Brochure - 6

We’re ready to help Whatever your gas analysis requirements, wherever you are. These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices legislation or regulation. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a...

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