SERVOPRO NanoTrace DF-560E Product Brochure
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SERVOPRO NanoTrace DF-560E Product Brochure - 1

Product overview Ultra High Purity From our ground-breaking ULTRA series, a Coulometric oxygen analyzer for electronicsgrade gas analysis: low 45ppt detection and easy operation Unrivalled performance SENSING TECHNOLOGY Coulometric Industry-leading 45ppt Lower Detection Limit (LDL) Factory calibrated sensors for simplified commissioning Uses industry-leading low drift, highly stable, Coulometric E-sensor technology Non-depleting Coulometric sensor with industry-leading five-year warranty Fast speed of response to quickly alert operators of out of specification gas conditions Requires only an annual SPAN calibration and quarterly RSA fluid replenishment Flexible Suitable for use H2, He, N2, Ar and other inert gases‡ Sensor accommodates sample flow rate fluctuations Use in 18 different sample gases, standard with our gas scale factor feature Easy to use Optional calibration system for compact integration onto the rear of the analzyer Key applications Quality control checks for electronics grade gases Leak detection for electronics grade gas lines Manufactured by Servomex - over 70 years experience with thousands of units used in the field Benchmark compliance RoHS 3 and REACH IEC 61010-1 Overvoltage Category II, Pollution Degree 2 EU EMC Directive EU Low Voltage Directive ‡ Consult Servomex for other gases Operable via front panel or digital communication options Comprehensive automated datalogging with 4 day and 30 day graphical reading records For more information visit servomex.com/contac

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SERVOPRO NanoTrace DF-560E Product Brochure - 2

Product overview Ultra High Purity High stability coulometric trace and ultra-trace measurements Introducing the Servomex ULTRA range of products offering unparalelled performance for CQC (Continuous Quality Control) analysis in UHP gases used in semiconductor wafer manufacturing. When you require the measurement of ultra-trace oxygen as a contaminant, either for quality control or leak detection purposes, you need a gas analyzer that delivers performance, stability and reliability. The lowest LDL is essential, as is the ability to carry out consistent, high stability measurements in upset...

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SERVOPRO NanoTrace DF-560E Product Brochure - 3

Technical data sheet SERVOPRO NanoTrace DF-560E ULTRA Specifications Background gases H2, He, N2, Ar and other inert gases‡ Coulometric non-depleting electrochemical sensor Performance Measurement range Intrinsic error (accuracy) ±3% of reading or ±0.5ppb, whichever is greater <30 seconds typical, <45 seconds max Zero drift/month Lower detection limit (LDL) Display resolution Upset recovery time <15 minutes to return to within 15 ppb of previous stable reading Signal outputs/inputs Analog outputs 2 analog output options standard: isolated 4-20mA and 0-10V DC. Analog output can be configured...

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SERVOPRO NanoTrace DF-560E Product Brochure - 4

Physical Size Benchtop, panel mount or rack mount options Storage temperature Sensor storage conditions We recommend that the analyzer be operated as intended, within 6 months of delivery Utilities Supply voltage Sample wetted materials Analyzer fitted with Stainless steel, G10, Epoxy resin, Acrylic, Buna-N, and PVC This product complies with the EU EMC Directive, the EU Low Voltage Directive, Overvoltage Category II, Pollution Degree 2 and all other applicable CE directives. Electrical safety Dimensional drawings Dimensions shown in millimetres [

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SERVOPRO NanoTrace DF-560E Product Brochure - 5

Options Configuration options Sensor Stab-El sensor Power input 110 - 220 VAC universal input power Calibration system Not required Automated calibration system Manual calibration system Auto control of user-cal Standard capacity High capacity Case purge Panel mount Rack mount Bench top Flow alarm Relay contacts Four relay contacts Stainless steel outlet Downstream isolation valve UHP flow control valve High purity pressure regulator Power cord Not required USA Europe UK Not required Required Stainless steel tags Tag text - 01 Tag text - 02 Tag text - 03 Electrolyte type Electrolyte...

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SERVOPRO NanoTrace DF-560E Product Brochure - 6

We’re ready to help Whatever your gas analysis requirements, wherever you are. These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices legislation or regulation. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a...

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