SERVOPRO NanoChrome ULTRA Product Brochure
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SERVOPRO NanoChrome ULTRA Product Brochure - 1

PRODUCT OVERVIEW S E R V O P R O NanoChrome ULTRA ULTRA HIGH PURITY FROM OUR GROUND-BREAKING ULTRA SERIES, AN ULTRA TRACE ANALYZER FOR SEMICONDUCTOR PROCESSES: MEASURES H2, CH4, CO, CO2, N2, Ar AND NMHC UNRIVALLED PERFORMANCE Innovative high-sensitivity Plasma Emission Detector (PED) enables ultra-trace measurements of Ar, N2, H2, CH4, CO and CO2, and NMHC GAS SENSING TECHNOLOGY Comprehensive report monitoring software for full access to chromatograms, process results, statistics and historical values ProPeak peak detection technique enables unprecedented measurement sensitivity Internal dilution system option Direct Analysis Methodology removes uncertainties of FID and RGD measurements FLEXIBLE Comprehensive solution for ultra-trace H2, CH4, CO, CO2, N2, Ar and NMHC in a wide range of common background gases including He, H2, N2, Ar and O2 requirement for flammable No fuel gas, improving safety and simplifying installation LOW COST OF OWNERSHIP Non-depleting sensor and intelligent software extends calibration intervals need for methaniser or No consumable fuel gas Cost-effective and simplified ongoing maintenance gas analysis solution when combined with DF-500 analyzers for trace O2 and DF-700 analyzers for trace moisture KEY APPLICATIONS Semiconductor production - quality control measurements BENCHMARK COMPLIANCE compliance with Low In Voltage, EMC and applicable Directives Digital communications for remote access: Internet/ Ethernet and RS232 Semiconductor production - stationary analytical systems UHP gas production - quality control measurements Learn more about the SERVOPRO NanoChrome ULTRA Visit servomex.expert/pb-ncu

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SERVOPRO NanoChrome ULTRA Product Brochure - 2

PRODUCT OVERVIEW S E R V O P R O NanoChrome ULTRA THE DEFINITIVE SOLUTION FOR UHP GAS MONITORING APPLICATIONS Introducing the NanoChrome ULTRA...The Servomex range of ULTRA analyzers offer a complete CQC solution for UHP gases used in the semiconductor industry with LDLs down to double digit ppts. Continuing the tradition of unparalelled analysis for UHP gas, the NanoChrome ULTRA offers a redesigned software system and PED leading to improved perfomance over the standard sub ppb NanoChrome with LDLs of up to 5x less than its predecessor. ULTRA HIGH PURITY USEFUL LINKS A NO COMPROMISE...

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SERVOPRO NanoChrome ULTRA Product Brochure - 3

TECHNICAL DATA SHEET S E R V O P R O NanoChrome ULTRA SPECIFICATIONS gas measured H2, CH4, CO, CO2, N2, Ar and NMHC impurities in UHP gases Plasma emission detector (PED) Range Accuracy (intrinsic error) FS signal outputs/inputs Analog output 1 x 4-20mA output per peak - up to 8 outputs Digital outputs 1 x remote range identification output per peak - up to 8 2 x alarm dry contact outputs - user pre-settable limited 1 x system status dry contact output Digital inputs 1 x digital isolated input - remote initiation of analysis Serial comms Remote interaction via RS232 ASCII protocol and...

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SERVOPRO NanoChrome ULTRA Product Brochure - 4

Oil free, non-corrosive, non-condensing Sample flow Sample pressure He carrier gas must be free of Ar (<1ppb) Inlet pressure O2 background gas = 85psig, other background gases = 80psig UTILITIES Supply voltage * Normally helium. Argon carrier gas used for N2 determination in Argon ** The analyzer is supplied configured with one of these voltage ranges; specify range at time of order This product complies with the EMC Directive, the Low Voltage Directive, and all other applicable directives. electrical safety Electrical safety to IEC 61010-1 Rated for “Overvoltage Category II” and “Pollution...

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SERVOPRO NanoChrome ULTRA Product Brochure - 5

APPLICATION CONFIGURATIONS Packages Form Factor MC = MASTER CHASSIS, SC = SECONDARY CHASSIS, PC = STAND-ALONE COMPUTER

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SERVOPRO NanoChrome ULTRA Product Brochure - 6

WE’RE READY TO HELP WHATEVER YOUR GAS ANALYSIS REQUIREMENTS, WHEREVER YOU ARE These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices Directive 93/42EEC. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a policy of...

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