Product overview Safe area Sub-ppb trace measurement of H2, CH4, CO, CO2, N2, Ar and NMHC for the semiconductor industry Unrivalled performance Measures Ultra Trace ppb SENSING TECHNOLOGY Innovative high-sensitivity Plasma Emission Detector (PED) enables ultra-trace measurements of Ar, N2, H2, CH4, CO and CO2, and NMHC Comprehensive report monitoring software for full access to chromatograms, process results, statistics and historical values ProPeak peak detection technique enables unprecedented measurement sensitivity Internal dilution system option Direct Analysis Methodology removes uncertainties of FID and RGD measurements Flexible Comprehensive solution for ultra-trace H2, CH4, CO, CO2, N2, Ar and NMHC in a wide range of common background gases including He, H2, N2, Ar and O2 A complete stand-alone UHP gas analysis solution when combined with DF-500 analyzers for trace O2 and DF-700 analyzers for trace moisture Key applications Semiconductor production quality control measurements No requirement for flammable fuel gas, improving safety and simplifying installation Low cost of ownership Non-depleting sensor and intelligent software extends calibration intervals No need for methaniser or consumable fuel gas Cost-effective and simplified ongoing maintenance Benchmark compliance In compliance with Low Voltage, EMC and applicable Directives Digital communications for remote access: Internet/ Ethernet and RS232 Semiconductor production stationary analytical systems UHP gas production - quality control measurements For more information visit servomex.com/contact

NanoChrome The definitive solution for UHP gas monitoring applications When monitoring UHP gases used in semiconductor wafer manufacture, the highest sensitivity and performance is essential. A suitable analytical solution must offer the flexibility to monitor all required gases in common background gases - and do so with complete selectivity and accuracy at ultra-trace levels. No matter your application needs, you’ll want a solution that can reduce ongoing costs and help you leverage business efficiencies. We don’t believe you should have to compromise. A no compromise solution The NanoChrome...

Technical data sheet SERVOPRO NanoChrome H2, CH4, CO, CO2, N2, Ar and NMHC impurities in UHP gases Plasma emission detector (PED) Range Accuracy (intrinsic error) FS Signal outputs/inputs Analog output 1 x 4-20mA output per peak - up to 8 outputs Digital outputs 1 x remote range identification output per peak - up to 8 2 x alarm dry contact outputs - user pre-settable limited 1 x system status dry contact output Digital inputs 1 x digital isolated input - remote initiation of analysis Serial comms Remote interaction via RS232 ASCII protocol and ethernet/internet Options Sample dilution Internal,...

Oil free, non-corrosive, non-condensing Sample flow Sample pressure He carrier gas recommended to be free of Ar (<1ppb) when measuring Argon impurity Inlet pressure O2 background gas = 85psig, other background gases = 80psig Utilities Supply voltage * Normally helium. Argon carrier gas used for N2 determination in Argon ** The analyzer is supplied configured with one of these voltage ranges; specify range at time of order This product complies with the EMC Directive, the Low Voltage Directive, and all other applicable directives. Electrical safety Electrical safety to IEC 61010-1 Rated for “Overvoltage...

Application configurations Form Factor MC = master chassis, SC = secondary chassis, PC = stand-alone computer

We’re ready to help Whatever your gas analysis requirements, wherever you are. These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices legislation or regulation. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a policy...