SERVOPRO DF-760E NanoTrace ULTRA Product Brochure
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SERVOPRO DF-760E NanoTrace ULTRA Product Brochure - 1

PRODUCT OVERVIEW S E R V O P R O DF-760E NanoTrace ULTRA ULTRA HIGH PURITY FROM OUR GROUND-BREAKING ULTRA SERIES, A UNIQUE DUAL MEASUREMENT TRACE/ULTRA TRACE MOISTURE/OXYGEN ANALYZER FOR UHP BULK GAS ANALYSIS UNRIVALLED PERFORMANCE Stable, accurate sensing delivers industry-leading trace measurements Manufactured by Servomex over 60 years’ experience pioneering gas analysis thousands of units used in the field FLEXIBLE SENSING TECHNOLOGY nique industry solution for U ppt monitoring of moisture and oxygen Operable via front panel or digital communication options road Detection Range: B 0-20ppm – 0-2ppb min (H2O)/ 0-20ppm – 0-1ppb min (O2) EASY TO USE KEY APPLICATIONS ulk gas quality control B checks for integrated circuit board fabs eak detection checks L Dual analysis capability provides ‘one-box’ solution for H2O / O2 trace contaminant measurements single analyzer can be used A for multiple background gases: N2, H2, He, Ar and O2 Learn more about the DF-760E NanoTrace ULTRA Resilient TDL and non- depleting Coulometric sensing requires minimal ongoing maintenance Negligible sensor drift greatly extends calibration intervals TDL immune from acid damage Overvoltage Category II, Pollution Degree 2

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SERVOPRO DF-760E NanoTrace ULTRA Product Brochure - 2

PRODUCT OVERVIEW S E R V O P R O DF-760E NanoTrace ULTRA FLEXIBLE TDL TRACE AND ULTRA-TRACE MEASUREMENTS ULTRA HIGH PURITY USEFUL LINKS Introducing the Servomex ULTRA range of products, offering unparalelled performance for CQC analysis of UHP gases used in semiconductor wafer fabs. The DF760E ULTRA offers improved performance over its predecessor DF760, with improved signal processing algorithms. When you work in the manufacture of integrated circuit boards, the quality control of electronics grade UHP gas is crucial. To measure oxygen and moisture as a trace contaminant, you’ll want a...

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SERVOPRO DF-760E NanoTrace ULTRA Product Brochure - 3

TECHNICAL DATA SHEET S E R V O P R O DF-760E NanoTrace ULTRA SPECIFICATIONS GasES measured Tunable laser diode (TDL) and coulometric Background gases Technology Measurement range N2, H2, He, Ar and O2 Tunable laser diode (TDL) ±3% of reading / ±0.2ppb (whichever is greater) ±3% of reading / ±0.1ppb (whichever is greater) Lower detection limit Intrinsic error (accuracy) FS Response time (T90) Zero drift/month Smallest recommended output range Upset recovery time <5 minutes to return to within 10ppb of previous stable reading SIGNAL OUTPUTS/inputs Analog output 5 output options available for...

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SERVOPRO DF-760E NanoTrace ULTRA Product Brochure - 4

OPERATING ENVIRONMENT Temperature Operating: +10°C to +40°C (+50°F to +105°F) Storage: Less than +50ºC, shielded from direct sunlight Relative humidity Operating altitude range PHYSICAL Size Aspirator vacuum source Aspirator with 1/4” compression inlet and outlet fittings 19” rack mount NEMA 1 enclosure Sensor storage conditions We recommend that the analyzer be operated as intended, within 6 months of delivery UTILITIES Supply voltage Nitrogen or air at 80psig (+/- 3psig), 15 l/min with a backpressure on outlet stream of <2psig Pneumatically actuated springless diaphragm valves, orbital...

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SERVOPRO DF-760E NanoTrace ULTRA Product Brochure - 5

OPTIONS description Pump vacuum source Pump with 1/4” compression inlet and outlet fittings Hydrogen safety system purge Optional safety system for use with hydrogen includes sample delivery interlock and case purge valves for instrument housing, NEMA 4 enclosure and Z purge protection system for optional external vacuum pump. Hydrogen safety system can be ordered with or without the NEMA 4 enclosure and Z purge protection system for the optional vacuum pump (NOTE: hydrogen safety system limits available relays from 4 to 3) configruation options Power input 110 VAC input power 220 VAC input...

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SERVOPRO DF-760E NanoTrace ULTRA Product Brochure - 6

WE’RE READY TO HELP WHATEVER YOUR GAS ANALYSIS REQUIREMENTS, WHEREVER YOU ARE These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices Directive 93/42EEC. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a policy of...

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