SERVOPRO DF-750 NanoTrace Product Brochure
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SERVOPRO DF-750 NanoTrace Product Brochure - 1

PRODUCT OVERVIEW S E R V O P R O DF-750 NanoTrace HIGH PURITY TUNABLE DIODE LASER (TDL) TRACE/ULTRATRACE MOISTURE MEASUREMENTS FOR QUALITY CONTROL IN SEMICONDUCTOR FABS UNRIVALLED PERFORMANCE Uses industry-leading, high stability TDL trace sensing with zero drift GAS MOISTURE APPLICATION QUALITY ULTRA TRACE PPB ULTRA TRACE PPT SENSING TECHNOLOGY Analysis resistant to gas cell contamination: DF-750 operates to specification with up to 90% signal loss Industry-leading 100ppt Lower Detection Limit Manufactured by Servomex over 60 years’ experience pioneering gas analysis with thousands of units used in the field FLEXIBLE Broad detection range: 0-20ppm Storage and recall function: calibration, system error and measurement data facilitates archiving operational history Operable via front panel or digital communication options Bulk gas quality control checks for UHP electronic gases used in 300mm semiconductor fabs Leak detection checks for UHP electronic gases used in 300mm semiconductor fabs Learn more about the DF-750 NanoTrace EASY TO USE Simplified ongoing maintenance requirements through the use of nondepleting, low drift potential TDL sensing technology High reliability - repeatable baseline measurements are not affected by a loss in mirror reflectivity LOW COST OF OWNERSHIP Robust sensor construction reduces maintenance requirements Absence of zero drift extends calibration intervals BENCHMARK COMPLIANCE IEC 61010-1 Overvoltage Category II, Pollution Degree 2 EU EMC Directive EU Low Voltage Directive

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SERVOPRO DF-750 NanoTrace Product Brochure - 2

PRODUCT OVERVIEW S E R V O P R O DF-750 NanoTrace HIGH STABILITY TDL TRACE/ULTRA-TRACE MEASUREMENTS Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. You need a moisture analyzer that can deliver high stability measurements with sensitive and consistent performance. An accurate and low LDL is a must, as is the need to easily store and recall data/calibration records. Regardless of your application requirements, you’ll want a moisture analyzer that can provide operational efficiencies. We don’t believe you should have to compromise. HIGH PURITY...

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SERVOPRO DF-750 NanoTrace Product Brochure - 3

TECHNICAL DATA SHEET S E R V O P R O DF-750 NanoTrace SPECIFICATIONS Gas measured Tunable Laser Diode (TDL) PERFORMANCE Measurement range Lower detection limit Intrinsic error (accuracy) FS ±3% of reading / ±0.2ppb (whichever is greater) Zero drift/month Span drift/month Smallest recommended output range Upset recovery time <5 minutes to return to within 10ppb of previous stable reading SIGNAL OUTPUTS/inputs Analog output 5 output options available Isolated 4-20mA dc and a choice of 0-1, 0-2, 0-5 or 0-10V dc Analog output range Output parameters Scalable to any range between 0-2ppb to...

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SERVOPRO DF-750 NanoTrace Product Brochure - 4

PHYSICAL Size Aspirator vacuum source Aspirator with 1/4” compression inlet and outlet fittings 19” rack mount NEMA 1 enclosure UTILITIES Supply voltage Optional - recommended if operating near LDL Nitrogen or air at 80psig (±3psig) 15l/min with a backpressure on outlet stream of <2psig with 1/4” compression inlet and outlet fittings Pneumatically actuated springless diaphragm valves, orbital butt welded assembly with zero dead volume for sensor isolation and zero verification high capacity moisture dryer provides moisture-free zero gas heated and temperature controlled sample delivery...

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SERVOPRO DF-750 NanoTrace Product Brochure - 5

OPTIONS description Pump vacuum source Pump with 1/4” compression inlet and outlet fittings Hydrogen safety system purge Optional safety system for use with hydrogen includes sample delivery interlock and case purge valves for instrument housing, and enclosure and purge protection system for optional external vacuum pump. Hydrogen safety system can be ordered with or without the enclosure and purge protection system for the optional vacuum pump (NOTE: hydrogen safety system limits available relays from 4 to 3) configruation options Power input 110 VAC input power 220 VAC input power...

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SERVOPRO DF-750 NanoTrace Product Brochure - 6

WE’RE READY TO HELP WHATEVER YOUR GAS ANALYSIS REQUIREMENTS, WHEREVER YOU ARE These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices Directive 93/42EEC. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a policy of...

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