PRODUCT OVERVIEW S E R V O P R O DF-730 NanoTrace HIGH PURITY TUNABLE DIODE LASER (TDL) TRACE MOISTURE MEASUREMENTS, SUITABLE FOR MONITORING ELECTRONIC GRADE HCI GAS PRODUCTION IN SEMICONDUCTOR FABS UNRIVALLED PERFORMANCE ses industry-leading, high U stability Tunable Diode Laser (TDL) sensing technology GAS MOISTURE APPLICATION QUALITY SENSING TECHNOLOGY Analysis resistant to gas cell contamination: DF-730 operates to specification with up to 90% signal loss 10ppb Lower Detection Limit (LDL) Manufactured by Servomex over 60 years’ experience with thousands of units used in the field LOW COST OF OWNERSHIP Maintenance periods extended through the use of ultra-stable TDL sensing technology Absence of zero drift reduces calibration requirements BENCHMARK COMPLIANCE IEC 61010-1 Overvoltage Category II, Pollution Degree 2 EU EMC Directive EU Low Voltage Directive Broad detection range: 0ppb – 10ppm Operable via front panel or digital communication options KEY APPLICATIONS Quality control of HCl gas in semiconductor fabs Simplified ongoing maintenance requirements with no consumables required High reliability; repeatable baseline measurements unaffected by loss in mirror reflectivity Learn more about the DF-730 NanoTrace

PRODUCT OVERVIEW S E R V O P R O DF-730 NanoTrace HIGH STABILITY COULOMETRIC TRACE AND PERCENT MEASUREMENTS When you require quality control of electronics grade HCI gas, you need a moisture analyzer that delivers consistent, reliable measurements with sensitive performance. A flexible monitoring range is a must, as is a sensing technology that operates effectively for extended periods - even with significant signal loss. No matter what your application requires, you’ll want a moisture analyzer that can reduce your ongoing costs and provide operational efficiencies. At Servomex, we don’t believe...

TECHNICAL DATA SHEET S E R V O P R O DF-730 NanoTrace SPECIFICATIONS Gas measured Tunable Laser Diode (TDL) PERFORMANCE Measurement range Lower detection limit Intrinsic error (accuracy) FS ±5% of reading / ±0.5ppb (whichever is greater) Zero drift/month Span drift/month Smallest recommended output range Upset recovery time <15 minutes to return to within 10ppb of previous stable reading SIGNAL OUTPUTS/inputs Analog outputs 5 output options available Isolated 4-20mA dc and a choice of 0-1, 0-2, 0-5 or 0-10V dc Analog output range Scalable to any range between 0-100ppb to 0-10ppm (LDL 10ppb) Audible/visual...

PHYSICAL Size Vacuum source High capacity, rocking piston vacuum pump 19” rack mount NEMA 1 enclosure UTILITIES Supply voltage Optional - recommended if operating near LDL This product complies with the EU EMC Directive, the EU Low Voltage Directive, Overvoltage Category II, Pollution Degree 2 and all other applicable directives. electrical safety SAMPLE WETTED MATERIALS ANALYZER FITTED WITH Stainless steel G10 Epoxy Polypropylene Sapphire OPTIONS configruation options Power input 110 VAC input power 220 VAC input power Not required RS232 communication RS485 communication Special analog output...

DIMENSIONAL DRAWINGS Dimensions shown in millimetres [inches]

WE’RE READY TO HELP WHATEVER YOUR GAS ANALYSIS REQUIREMENTS, WHEREVER YOU ARE These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices Directive 93/42EEC. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a policy of constant...