SERVOPRO DF-560E NanoTrace ULTRA Product Brochure
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SERVOPRO DF-560E NanoTrace ULTRA Product Brochure - 1

PRODUCT OVERVIEW S E R V O P R O DF-560E NanoTrace ULTRA ULTRA HIGH PURITY FROM OUR GROUND-BREAKING ULTRA SERIES, A COULOMETRIC OXYGEN ANALYZER FOR ELECTRONICS-GRADE GAS ANALYSIS: LOW 45PPT DETECTION & EASY OPERATION UNRIVALLED PERFORMANCE ndustry-leading 45ppt Lower I Detection Limit (LDL) ses industry-leading low drift, U highly stable, Coulometric E-sensor technology GAS OXYGEN Fast speed of response to quickly alert operators of out of specification gas conditions SENSING TECHNOLOGY On-board calibration system option gives both flexibility and portability Optional calibration system for compact integration onto the rear of the panel, optimizing device portability perable via front panel or O digital communication options Broad detection range: 0-1ppb - 0-20ppm Suitable for use H2, He, CH4, CO, N2, Ar and a host of fluorocarbons and slightly acidic HP gases‡ Sensor compensates for sample and flow rate fluctuations - ideal for upset prone applications Battery backup optional* Comprehensive automated datalogging with 4 day and 30 day graphical reading records Factory calibrated sensors for simplified commissioning Non-depleting Coulometric sensor with five-year warranty Requires only an annual SPAN calibration and quarterly addition of RSA Use in 18 different sample gases. Standard with our gas scale factor feature‡ Expensive purifier replacements not required BENCHMARK COMPLIANCE Quality control checks for electronics grade gases Manufactured by Servomex - over 60 years experience with thousands of units used in the field Leak detection for electronics grade gas lines Overvoltage Category II, Pollution Degree 2 EU EMC Directive EU Low Voltage Directive * Not for use with flammable samples ‡ Analyzer for use with flammable samples shall be configured with stainless steel inlet and outlet plumbing only Learn more about the DF-560E NanoTrace ULTRA

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SERVOPRO DF-560E NanoTrace ULTRA Product Brochure - 2

PRODUCT OVERVIEW S E R V O P R O DF-560E NanoTrace ULTRA HIGH STABILITY COULOMETRIC TRACE AND PERCENT MEASUREMENTS ULTRA HIGH PURITY USEFUL LINKS Introducing the Servomex ULTRA range of products offering unparalelled performance for CQC analysis in UHP gases used in semiconductor wafer manufacturing. When you require the measurement of ultra-trace oxygen as a contaminant, either for quality control or leak detection purposes, you need a gas analyzer that delivers performance, stability and reliability. The lowest LDL is essential, as is the ability to carry out consistent, high stability...

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SERVOPRO DF-560E NanoTrace ULTRA Product Brochure - 3

TECHNICAL DATA SHEET S E R V O P R O DF-560E NanoTrace ULTRA SPECIFICATIONS Gas measured H2, He, CH4, CO, N2, Ar and a host of fluorocarbons and slightly acidic HP gases‡ Coulometric non-depleting electrochemical sensor PERFORMANCE Measurement range Intrinsic error (accuracy) FS ±3% of reading / 3% of measurement range or ±0.1ppb Zero drift/month Lower detection limit (LDL) Upset recovery time <5 minutes to return to within 10ppb of previous stable reading depending on flow rate SIGNAL OUTPUTs/inputs Analog outputs 4 analog and digital output options available; Non-isolated 0-5V dc, 0-1,...

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SERVOPRO DF-560E NanoTrace ULTRA Product Brochure - 4

PHYSICAL Size Benchtop, panel mount or rack mount options Storage temperature Sensor storage conditions We recommend that the analyzer be operated as intended, within 6 months of delivery UTILITIES Supply voltage SAMPLE WETTED MATERIALS ANALYZER FITTED WITH Stainless steel, G10 epoxy and polypropylene This product complies with the EU EMC Directive, the EU Low Voltage Directive, Overvoltage Category II, Pollution Degree 2 and all other applicable directives. electrical safety DIMENSIONAL DRAWINGS Dimensions shown in millimetres [

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SERVOPRO DF-560E NanoTrace ULTRA Product Brochure - 5

OPTIONS configruation options Sensor Basic sensor Stab-El sensor Power input 110 VAC input power 220 VAC input power Calibration system Not required Automated calibration system Manual calibration system Auto control of user-cal HIgh capacity purifier Case purge Panel mount Rack mount Bench top Not required RS232 communication RS485 communication Flow alarm Relay contacts Not required One relay contact Two relay contacts Three relay contacts Four relay contacts Stainless steel outlet Downstream isolation valve UHP flow control valve High purity pressure regulator High purity regulator...

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SERVOPRO DF-560E NanoTrace ULTRA Product Brochure - 6

OPTIONS configruation options Not required Required Stainless steel tags Tag text - 01 Tag text - 02 Tag text - 03 Electrolyte type Electrolyte shipment method None required, has own stock From factory (add line item) Other Smx plnt (add line item) Please tick the box for required options

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SERVOPRO DF-560E NanoTrace ULTRA Product Brochure - 7

WE’RE READY TO HELP WHATEVER YOUR GAS ANALYSIS REQUIREMENTS, WHEREVER YOU ARE These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices Directive 93/42EEC. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a policy of...

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