A COMPLETE SINGLE-SUPPLIER SOLUTION Discover the innovative ULTRA series NEXT-GENERATION RELIABILITY Meet our new Gen-7 moisture analyzer range SUSTAINABLE GAS ANALYSIS Learn how we’re supporting cleaner industry

THE NEW SERVOPRO DF-700 NanoTrace SERIES NEXT-GENERATION RELIABILITY SUPPORTING YOUR GLOBAL SEMICONDUCTOR PROCESSES Welcome to Issue 40 of our Expert Solutions (ES) magazine, which focuses on our innovative, industry-leading gas analysis solutions for the semiconductor industry. Semiconductor manufacturing relies on ultra-high purity (UHP) gases to ensure high quality and precision, and to avoid contamination. The purity of these gases in turn depends upon accurate gas analysis at trace and ultra-trace levels. In this issue, we showcase Servomex’s ULTRA range of analyzers, which together comprise...

APPLICATION FOCUS A COMPLETE SOLUTION FOR SEMICONDUCTOR GAS ANALYSIS Semiconductor manufacturing relies on the use of ultra-high purity (UHP) gases. Whether it’s the production of silicon wafers needed for semiconductor applications, or the manufacture of electronics including LED and LCD screens, even the smallest impurities in the bulk gases can cause major defects, resulting in costly scrap and waste. Bulk gas purification techniques require continuous real-time gas monitoring to validate that quality specifications are met. Instrumentation entrusted in this role must have the lowest detection...

PRODUCT FOCUS BENEFITS INCLUDE: HIGH-STABILITY SENSING REDUCED MAINTENANCE REQUIREMENTS Utilizing Servomex’s high-stability, non-depleting Coulometric sensing technology, the analyzer quickly responds and recovers from upset-prone applications. It is temperaturecompensated and unaffected by moderate fluctuations in sample flow rate changes. Automated calibration options carry out user-selectable zero and annual span calibrations on a pre-scheduled basis. Also, scheduled electrolyte reminders keep your sensor in top condition, improving uptime to make sure your measurement data stream is not interrupted....

SEVEN REASONS TO CHOOSE GEN-7 Every model in the Gen-7 range of the NanoTrace DF-700 Series analyzers has been redesigned, with a bigger screen and larger buttons, making it more user-friendly and providing a smoother user experience. Don’t worry, the GUI menu structure is still the same, so no time-consuming training requirements are needed. Our NanoTrace DF-700 range of analyzers has been upgraded for a new generation of reliable trace and ultra-trace moisture analysis. Dependable and field-serviceable by design, the Gen-7 now combines an all-digital gas analysis platform with USB connectorized...

PRODUCT FOCUS BENEFITS INCLUDE: CONSISTENT HIGH PERFORMANCE The DF-750 ULTRA’s TDLAS sensor continuously sweeps the moisture peak, as do all the DF-700 NanoTrace family of products. This feature of TDLAS provides the user with a ratiometric measurement that is unaffected by loss of mirror reflectivity, laser intensity, detector efficiency and interfering gases. By auto-zeroing the system at MHz frequencies, we ensure accurate and precise measurements, as the spectral line is locked on by a secondary detection system. FLEXIBLE OPERATION With a broad detection range of 0-20ppm, the DF-750 ULTRA...

PRODUCT FOCUS GC-PED VS APIMS - WHICH IS THE BEST TECHNOLOGY FOR UHP GAS ANALYSIS? APIMS and GC-PED both offer analytical solutions for the quality assurance of gases used in the semiconductor manufacturing industry. When selecting a gas analyzer for continuous quality control, the advantages and disadvantages of each technique must be taken into account. An established, reliable gas analysis technique that combines the Gas Chromatography (GC) advantage of isolating impurities from the background gas with the selectivity and sensitivity of a Plasma Emission Detector (PED). Specifically developed...

PRODUCT FOCUS THE SUPERIOR OPTION FOR ULTRA-TRACE UHP GAS PURITY A high-performance analyzer specifically designed for the semiconductor manufacturing industry, the SERVOPRO NanoChrome ULTRA incorporates the latest advances in gas sensing and signal processing methodology. Using an advanced Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both specially developed by Servomex, it offers the highest reliability monitoring of argon (Ar), methane (CH4), carbon monoxide (CO), carbon dioxide (CO2), hydrogen (H2), nitrogen (N2) and non-methane hydrocarbons (NMHC) in a wide range...

HELPING TO BUILD A SUSTAINABLE FUTURE Servomex is firmly committed to sustainability, taking a ‘whole company’ approach. Our entire focus is on powering and enabling industrial change, principally by helping customers to make their industrial processes cleaner and more efficient. Our efforts are focused on four key UN Sustainable Development Goals: affordable and clean energy; industry, innovation, and infrastructure; responsible consumption and production; and climate action. We also have an impact in wider areas, including good health and wellbeing, and clean water and sanitation, while our...

GET THE RESOURCES YOU NEED TO SUPPORT YOUR PROCESS SOLUTION EXPERT PAPERS PRODUCT BROCHURES For an in-depth look at our gas analyzers and the technologies they use, download our expert papers. Written by our knowledgeable team, they examine how our sensing technologies work and explain why certain products deliver the best solution for key applications. For the best available information about our products, you’ll want to read our product brochures. They outline how the analyzer works and which applications it’s best suited to. It also explains the main features and their benefits, and lists...

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