Robust and reliable Production environments are not always the most friendly: variable conditions, vibrations, aggressive materials, etc. making measurement tasks more difficult. Our integrable sensors have been designed with exactly this in mind. The sealed sensor head keeps out debris and particles and our optical assembly contains no moving parts, so the sensors stay clean and aligned. Small size and low weight make designing for integration easy. Functional in any orientation, Sensofar sensors can be positioned as the application requires. Cable lengths are up to 20 m. Our sensors are perfectly...

They are designed from the outset to be integrated into the harshest manufacturing environments. Compact, lightweight and with flexible mounting options, Sensofar sensors put high-performance surface metrology right where you need it - at the application. Cleanroom compatible Some production environments such as those in semiconductor manufacturing are normally within strict conditions of particles. Now the S neox, our most powerful system, has the option to be ISO Class 1 thanks to a hardware innovation based on three main features: a stainless steel enclosure, a sealed PU bellow covering the...

The S mart 2 is the only areal confocal sensor on the market which is also an autonomous sensor. It is the perfect combination between compact design and versatility. The S neox addresses the need for maximum measurement flexibility in an integrable sensor and is thus the most versatile industrial system on the market. Optical Resolution Measurement noise Technologies FOV (single shot) Speed acq. Weight Cable length Computer Range of magnifications Interface of comunication Export files SensoSCAN (Acquisition software): .plux, .dat, .bmp 1 2.5X TI (NA 0.075, WD 10.3 mm) objective. 2 Confocal,...

The S neox Cleanroom is the most versatile integrable head on the market and the only one to be ISO Class 1 compatible. The S wide is designed to measure large areas in one single shot, suited for those applications where speed and shape measurement is the priority. SensoVIEW (Analysis software): .plux, .x3p, .dat, .pel, .stl 1 2.5X TI (NA 0.075, WD 10.3 mm) objective. 1 These magnifications refer to digital magnifications. 2 Confocal, 20X EPI and Z range=200 gm, speed 5X. 3 150X EPI (NA The optical magnification is 0.243X. 0.95 L&S Line and Space values for blue LED) objective. 4 PSI with PZT...

The real areal confocal head The S mart 2 areal confocal capability images an area at a time, so the lateral resolution and X and Y remain the same, unlike point or line confocal chromatics. In addition, our areal measurements are traceable to certified calibration specimens from national measurement institutions such as PTB, NPL or NIST. Conventional Confocal Chromatic systems Areal measurements will always be the closest representation to the real surface topography. Performance you’ll want to see To scan with the most suitable technology, the S mart 2 comes with three technologies to measure...

Easy to fit, easy to connect The shape of the integrable head has been engineered to improve the fitting of the system. Its narrow width allows the integrable head to be installed in zones that will not interfere with the user or the manufacturing operations. Designed to be exceptionally easy to integrate, the S mart 2 has all the electronics inside the head, including the computing power. Never before has it been so easy to install a Sensofar system, the S mart 2 has two single connections: an ethernet cable and a power supply. Our sensors product portfolio has been designed to fulfill the automatization...

Efficient design Confocal Ai Focus Variation Interferometry Autonomous areal confocal 8 The S mart 2 is the only autonomous areal confocal profilometer in the market and that is a must when high standards of lateral resolution, accuracy, and repeatability are required by the customer. Its powerful features and compact design turn it into a breakthrough in the optical field. The sensor head incorporates all the electronics, even the computing power, to facilitate its integration. Apart from Confocal, the S mart 2 has in the same head two more optical technologies: Ai Focus Variation and Interferometry...

Objective lenses System specifications Measuring principle Confocal, CSI and Ai Focus Variation Advanced Software Analysis Inc: SensoVIEW; Op: SensoPRO, SensoMAP Measurement types Image, 3D, 3D thickness Communication protocol DLL; gRPC (optional) Operating system Microsoft Windows 10®, 64 bit Confocal frame rate 60 fps Cable Length 3, 5 or 10 m (20 m optional) Vertical scan range Linear stage: 20 mm range; 5 nm resolution Max. Z measuring range 20 mm LED light sources Blue (460 nm); white (580 nm; center) Nosepiece 6 positions fully motorized Sample reflectivity 0.05 % to 100% 170.0 (6.69) Head...

Extreme versatility with high performance Ai Focus Variation | Confocal Interferometry | SR Red I Green I Blue I White The S neox pushes versatility to the extreme with 4-in-1 technology, providing unparalleled adaptability for different application requirements and maximum measurement flexibility on any surface. The versatility of the S neox allows for having DIC that enhances contrast to spot surface defects while choosing from 37 different objectives. Also, the option to add a piezoelectric Z motor provides the S neox with the highest performance in optical metrology. Measurement noise

Objective lenses System specifications Measuring principle Confocal, PSI, ePSI, CSI, Ai Focus Variation and Thin Film Measurement types Image, 3D, 3D thickness, profile and coordinates Advanced Software Analysis Inc: SensoVIEW; Op: SensoPRO, SensoMAP Communication protocol DLL; XML (optional) Confocal frame rate 60 fps (5 Mpx); 180 fps (1.2 Mpx) Computer Latest INTEL processor Vertical scan range coarse Linear stage: 40 mm range; 5 nm resolution Operating system Microsoft Windows 10®, 64 bit Vertical scan range fine Piezoelectric scanner with capacitive sensor: 200 μm range; 1.25 nm resolution...