SGNSIRION THE SENSOR COMPANY Datasheet SFC5300 / SFM5300 mass flow controller / meter for gases Product Information October 2016 - V1 ■ Ultra-fast settling time (down to 50 ms) ■ Excellent accuracy / repeatability (2% s.p. / 0.2% s.p. respectively) ■ Wide control range (1000:1) ■ Two digital interfaces: RS485, IO-Link ■ Compact downmount footprint ■ Multiple gases and gas recognition ■ NIST traceable calibration Unsurpassed CMOSens® Technology The SFC5300 / SFM5300 series continues Sensirions pioneering work in MEMS-based mass flow controllers and meters: The heart of this product is the unsurpassed Sensirion CMOSens® technology. It combines a high precision sensor element with state of the art signal processing on a single chip and thereby providing an accurately calibrated and temperature compensated signal (see Figure 1). Thanks to this sensor technology, the SFC5300 achieves unmatched ratings for speed, accuracy and repeatability. In addition, no recalibration is needed due to the inherent longterm stability of the CMOSens® technology. The SFC5300 offers fastest settling time, high control range as well as high flexibility regarding mechanical connectors and communication interfaces. Digital versions also provide optional smart features like multiple gases and ranges, gas recognition and self-test capability. The SFM5300 is the valve-free flow meter based on the SFC5300 mass flow controller. It features the same performance advantages and configurations as the MFC counterpart without providing the controller functionality. The brilliant performance of the SFC5300 / SFM5300 products makes them the best choice for a wide range of applications, such as analytical instrumentation, medical equipment and general process automation to name a few.

Digital linearisation & temperature compensation (on-chip) IZ linearised & temperature compensated signal raw data from the on-chip sensor •0- Controlled mass flow Figure 2: Block Diagram CMOSens® SFC5300 mass flow controller. Introductory Description The CMOSens® based SFC5300 / SFM5300 measure the gas mass flow by the calorimetric principle based on heat transfer. A heating element on a thermally insulated membrane is kept above ambient temperature. In the presence of gas flow, the temperature distribution up- and downstream is disturbed. This asymmetry is then measured. The whole arrangement...

Table 1: Overview of CMOSens® SFC5300 / SFM5300 Mass Flow Controller / Meter Specifications All data, unless otherwise noted, apply for the following calibration conditions: Temperature 20°C, Nitrogen (N2), 3.0 bar overpressure (inlet: 4.0 bar absolute) against atmosphere (outlet: 1.0 bar absolute), horizontal mounting position (electric connector on top), downmount connection Including offset, non-linearity and hysteresis. Measured against NIST traceable reference in % of set point (s.p.) = measured value (m.v.) = rate = reading Step answer from 10% to 100% of full scale within +5% of set point...

CMOSens SFC5300 / SFM5300 Mass Flow Controller / Meter for Gases Settling time Figure 4 compares the set point accuracy of a conventional mass flow controller / meter with a CMOSens SFC5300 / SFM5300. Typically, an accuracy of 1% FS (full scale) is stated for mass flow controllers using conventional sensor technology. The graph shows this in relation to the accuracy of the SFC5300 mass flow controller. It can be seen that especially at low flow rates the CMOSens technology reaches superior performance. The CMOSens SFC5300 mass flow controller has an ultra-fast settling time. Figure 6 shows...

CMOSens® SFC5300 / SFM5300 Mass Flow Controller / Meter for Gases Table 2: Overview of Wetted Materials. Standard configuration materials are shown in bold text. Optional materials are provided for large projects only. 2 Construction details 2.1 Packaging principle and sealing To guarantee a vacuum proof housing of the sensor and the flow path, several patented technologies are used. The CMOSens® chip itself is placed vacuum tight in a stainless steel package that is connected via O-ring sealing to the aluminium body. The packaging allows the SFC5300 / SFM5300 mass flow controller / meter to...

CMOSens® SFC5300 / SFM5300 Mass Flow Controller / Meter for Gases 3.1 Connector and pin layout SFC5300 / SFM5300 feature two digital interfaces: RS485, IO-Link. Detailed specification of the digital communication protocols can be found on the Sensirion website. The electrical connector of the SFC5300 / SFM5300 is a standard Sub-D 9pin. This enables an easy and reliable universal connection. See the pin layouts for different interface versions below: The SFC5300 / SFM5300 mass flow controller / meter require a standard voltage supply of +14.0 to + 26.0 VDC. There are no stringent requirements...

CMOSens SFC5300 / SFM5300 Mass Flow Controller / Meter for Gases 4 Physical dimensions and mounting information for SFC5300 / SFM5300 SFC5300 / SFM5300 come in two downmount variants: A shorter variant (top panel) with two downward facing screw threads and a longer variant (bottom panel) with four screw holes.

5 Supported flow units Table 6: Units for gas flow rates

CMOSens® SFC5300 / SFM5300 Mass Flow Controller / Meter for Gases Important notices Warning, personal injury Do not use this product as safety or emergency stop device or in any other application where failure of the product could result in personal injury. Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the data sheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for...

FCC and CE statement The SFC5300 and SFM5300 products have been tested and found to comply with the limits for a Class B digital device, pursuant to part 15 of the FCC Rules (FCC CFR 47). These limits are designed to provide reasonable protection against harmful interference in a residential installation. This equipment generates, uses and can radiate radio frequency energy and, if not installed and used in accordance with the instructions, may cause harmful interference to radio communications. However, there is no guarantee that interference will not occur in a particular installation. If this...