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SFM3200 Digital Flow Meter for medical applications

SFM3200 Digital Flow Meter for medical applications
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SFM3200 Digital Flow Meter for medical applications - 1

Data Sheet - SFM3200Digital Flow Meter for medical applications ■ Superior performance at very low flows ■ Low pressure drop ■ Inspiratory flow sensor ■ Flow range: up to 250 slm Product Summary The SFM3200 sensor is Sensirion's digital flow meter designed for high-volume applications. The SFM3200 measures the flow rate of air, oxygen and other non-aggressive gases with superb accuracy. A special design of the flow channel results in the very low pressure drop through the flow body of the sensor making it extremely suitable for medical ventilation and respiratory applications. The SFM3200 is designed to be resilient to rough handling and performs reliably at variable inlet conditions. The outstanding performance of these sensors is based on Sensirion's patented CMOSens® sensor technology, which combines the sensor element, signal processing and digital calibration on a single microchip. The flow rate of a gas is measured by a thermal sensor element which assures very fast signal processing time and bidirectional measurement mode with best in class accuracy. The signal is internally linearized and temperature compensated. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications. Applications ■ Ventilation ■ Anesthesia ■ Respiratory measurements ■ Inspiratory flow measurement ■ Drug delivery OEM options A variety of custom options can be implemented for high-volume OEM applications (custom flow rates, calibration for other gases, different body form factor etc.). For a reusable version of this sensor see the SFM3200-AW datasheet. Contact us for more information. Sensor chip The SFM3200 flow meter features a fifth-generation silicon sensor chip. In addition to a thermal mass flow sensor element, the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing circuitry, and interface. Due to seamless integration of signal acquisition and processing on the single silicon die significant performance and cost benefits are achieved.

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1. Sensor Performance1.1 Physical specificationsi Parameter 1.2 Ambient Conditions Parameter for "Typ" a CpK of 0.67 is targeted (95% of sensors within the Typ limit) for "Max" no sensor measured outside of this limits will be shipped and a CpK of 1.33 is targeted %m.v. = % measured value = % of reading one standard deviation, measured at full sampling rate without averaging noise level defined as standard deviation of individual sensor readings, measured at full sampling rate (typ: average of noise level ; max: at least 99.99% of sensors have a noise level below indicated value) these...

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1.3 Media compatibility The sensor can be used with gas mixtures, such as O2 and air. Please see application note: "GF_AN_SFM3200_SFM3300_Effects_Humidity_Gasjriixtures” for details. 2. Electrical Specifications 2.1 Electrical characteristics 2.3 Conversion to Physical Values In order to obtain the measured flow in [slm], the measured value needs to be converted using the following formula: measured value — offset flow flow [slm] = ■ scale factor flow Please note that the first measurement performed directly after chip initialization is not valid. 10 After 4.75V is reached 11 For...

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3. Mechanical Specifications3.1 Connection with medical cones Fittings of the SFM3200 sensor correspond to the international standard ISO5356-1:2004. Details about this type of connection can be found in the description of the standard. 3.2 Connection with O-ring O-ring socket: d1 = 22 mm, d2 = 1.5 mm O-ring cone: d1 = 20 mm, d2 = 1.5 mm

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4. Instructions for Use4.1 Calibration orientation The sensors are calibrated horizontally as depicted in the following graph: 4.2 Design guidelines In order to provide good flow conditions, the inner diameter of the connecting tube has to be approximately the same as the inner diameter of the SFM3200 main flow channel. The inlet tube has to be straight and at least 10 cm in length. The SFM3200 is equipped with meshes on the in- and outlets of the flow channel to reduce turbulences and thus improve the stability. Please refer to the application note "Inlet conditions for the SFM3000 Mass...

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Revision history Date

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Important Notices Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the datasheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application,...

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