SFM3000 Low Pressure Drop Digital Flow Meter
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Datasheet SFM3000 Low Pressure Drop Digital Flow Meter       Low pressure drop Flow range: +/- 200 slm (bidirectional) Accuracy 1.5% m.v. (typical) Very fast update time (0.5ms) Fully calibrated & temperature compensated Zero offset, no drift Product Summary The SFM3000 sensor is Sensirion’s digital flow meter designed for high-volume applications. It measures the flow rate of air, oxygen and other non-aggressive gases with superb accuracy. A special design of the flow channel results in the very low pressure drop through the flow body of the sensor making it extremely suitable for very demanding applications, such as medical ventilation and respiratory applications. The SFM3000 operates from a 5 Volt supply voltage and features a digital 2-wire I2C interface. The measurement results are internally linearized and temperature compensated. The outstanding performance of this sensor is based on Sensirion’s patented CMOSens® sensor technology, which combines the sensor element, signal processing and digital calibration on a single microchip. The flow rate of the gas is measured by a thermal sensor element which assures very fast signal processing time and bidirectional measurement with best-in-class accuracy. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications. Applications  Medical  Process automation  Burner control  Fuel cell control  Spectroscopy  Environment monitoring  Laboratory Sensor chip The SFM3000 flow meter features a fifth-generation silicon sensor chip SF05. In addition to a thermal mass flow sensor element, the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing circuitry, and interface. Due to seamless integration of signal acquisition and processing on the single silicon die significant performance and cost benefits are achieved. OEM options A variety of custom options can be implemented for highvolume OEM applications (custom flow rates, calibration for other gases, different body form factor etc.). Contact Sensirion for more information. Micro controller (master) SFM3000 with bidirectional digital communication (I2C bus)

1. Sensor performance 1.1 Physical specifications 1 1 Unless otherwise noted, all sensor specifications are valid at 25°C with Vdd = 5V and absolute pressure = 966 mbar. 2 Other calibration ranges are available for large volume projects 3 In standard liter per minute at 20°C and 1013 mbar 4 With ideal inlet and outlet conditions, at VDD = 5V, 25°C, absolute pressure = 966 mbar 5 Including offset, non-linearity, hysteresis 6 Sensor position horizontal (see Section 4.1) 7 Span or offset value, whichever is larger 8 In % of measured value (m.v.) = of rate = of reading 9 Shift due to...

2. Electrical specifications2.1 Electrical characteristics Electrical properties 12 After 4.75V is reached 13 16 bit with two least significant bits always zero connection please order the SFM3000 with a cap (according to the ordering information in Chapter 5). Diverse 4-core flat ribbon cables with crimp fittings can be used for electrical connection. 2.2.2 PCB soldering Standard selective soldering systems may be used for soldering SFM3000 sensors. Reflow soldering is not feasible and may damage the sensor. The sensor ports must be protected from solder splash and flux during soldering....

3. Mechanical specifications All dimensions are in millimeters (mm). 3.1 SFM3000 without cover (PCB mount) 3.2 Footprint 3.3 SFM3000 with cover Please refer to the mask given below for reliable PCB attachment using the dedicated snap-in feet. Consider using the screw holes of the SFM3000 for a sturdy integration of the sensor. If used with cover, sensor height is 34.4 mm instead of 33 mm. All the other dimensions are the same

Mechanical fitting Fittings of the SFM3000 sensor correspond to the international standard ISO5356-1:2004. Details about this type of connection can be found in the description of the standard. To minimize the risk of connectors being accidentally disconnected, latching connectors can be suggested. It is also possible to insert O-rings in the grooves and attach tubes with an inner diameter of 23 mm to the SFM3000. d1 = 19mm d2 = 2mm Cross section of recommended O-ring Calibration orientation The sensors are calibrated horizontally as depicted in the following graph: The SFM3000 sensor is...

5. Ordering information Use the part names and product numbers shown in the table below when ordering SFM3000 sensors. For the latest product information and local distributors, visit www.sensirion.com.

Important Notices Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the datasheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application,...