Sensirion Liquid Flow SLQ-QT500 Datasheet Preliminary V12
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Preliminary Product Specifications SLQ-QT500 Liquid Flow Meter High Purity Flow Meter For hydrocarbons and water-based liquids For high and low viscosity fluids Maximum flows up to 120 ml/min High Speed Flow Measurement Totally Non-Invasive, Straight flow channel Digital RS485 Interface Introduction SLQ-QT500 The SLQ-QT Liquid Flow Meter series enables fast, non-invasive measurements of liquids in semiconductor applications. The SLQ-QT500 extends the series’ capabilities to higher viscosities, and also enables the measurement of water based liquids such as TARC, acids, bases and DI water. The sensor is available with two calibrations: H2O and isopropanol (IPA). The fluidic part of the device comprises a single straight flow path without any moving elements. Due to the short response time, the SLQ-QT500 allows monitoring highly dynamic processes such as fast dosing operations. Benefits are highly increased process reliability and reduced consumption of precious media. Preliminary Key Specifications – subject to change Table 1: Specifications of SLQ-QT500 (all data at 23°C, 1 barabs unless otherwise noted) Parameter Maximum Flow Rate (water based) Maximum Flow Rate (hydro carbon based) Repeatability (1σ) Flow Detection Response Time Digital Interface (via RS485 Sensor Cable) Power Supply DC, VDD Protection Class Internal Capillary, Inner Diameter Attached tubing - inner / outer diameter Response Time On Power-Up Optimal Heat Up Time (for constant flow meas.) Mounting Orientation Sensitivity d Operating Temperature Pressure Drop (IPA @ 2000 µl/sec) Maximum Operating Pressure Burst Pressure Ambient Storage Temperature (empty channel) Maximum flow rate of 5000 µl/sec for water based liquids on demand available Maximum flow rate of 8200 µl/sec for hydrocarbon based liquids on demand available c Measured value d Normal position: horizontal flow channel, connector horizontally. For IPA @ 23°C e The PFA tubing starts to widen over time at higher pressures than 10 bar. This results in a continuous pressure drop that would have to be compensated f Burst pressure is not limited by the quartz capillary in the sensor, but by the PFA tubing a b

SLQ-QT500 Liquid Flow Meter Smart RS485 Sensor Cable The sensor comes equipped with Sensirion’s RS485 Sensor Cable. A microprocessor is integrated in the Senor Cable, which allows easy switching between different calibration modes (H2O, IPA), as well as an automatic flow detection feature. The latter allows the sensor to be operated in a minimum power mode at zero flow, which gives optimal heater control between dispenses. Up to 1000 data points can be stored in an internal buffer which allows an uncritical readout of the measurement in terms of timing. A Totalizator function offers the...

SLQ-QT500 Liquid Flow Meter Mechanical Specifications Fig.1 shows the general design of the SLQ-QT500 sensor. The microsensor chip position allows optimal bubble detection in a typical mounting geometry. Hereby, the mounting holes are used to install the sensor in a ‘hanging’ position, in which the chip lies on top of the flow channel. Very small bubbles will therefore pass though the flow channel in close proximity to the sensor chip, which ensures optimal bubble detection. Fig. 1: Design of the sensor. Chip lies on top of the flow channel, if sensor is installed in a ‘hanging’ position....

SLQ-QT500 Liquid Flow Meter Fig. 2: Dimensions of the sensor from different views. 4.1 Materials Table 3: Wetted Materials Part Table 4: Non-Wetted Materials Part Plastic Tubing ¼” Capillary Housing Screws and electrical connector Cables PPS Stainless Steel Copper, ETFE 4.2 Labels The SLQ-QT500 is equipped with two labels on opposite sides of the housing. Both labels are solvent resistant and contain information about Sensirion product name Calibrations on the sensor: calibration field (CF), liquid (H2O or IPA), maximum calibrated flow rate Serial number as number and encoded in 2D bar code...

SLQ-QT500 Liquid Flow Meter Liquid Temperature Management Due to the used microsensor technology, the amount of thermal energy introduced into the liquid is very small. It is generally recommended to avoid heat-up of the liquid in the thermal flow meter however, by turning off the micro heater when the liquid is not flowing. For instruction on how to control the sensor’s micro heater and on the low power mode refer to separate documentation. When measuring according to the instruction for dosing measurements, the heat up behavior of the liquid is given in table 5. Table 5: Heat-up behavior...

SLQ-QT500 Liquid Flow Meter For flow rates up to 2000 µl/sec the expected repeatability is <2% of measured value for both calibrations (H2O and IPA). This repeatability can only be expected for a process at constant temperatures and a fixed tubing geometry and sensor mounting. Moving of tubing or sensor will result in an offset of the measurement due to a changed flow profile inside of the sensor. The measurement is most sensitive to these conditions for high flow rates and low viscosity liquids. Optimal use of the sensor is achieved if the sensor and tubing is fixed after installation in...

SLQ-QT500 Liquid Flow Meter 11 Important Notices the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period. This warranty does not apply to any equipment which has not been installed and used within the specifications recommended by SENSIRION for the intended and proper use of the equipment. EXCEPT FOR THE WARRANTIES EXPRESSLY SET FORTH HEREIN, SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS OR IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES OF MERCHANTABILITY OR FITNESS FOR...