High Purity Milliliter Flow Meter for Hydrocarbons Sensitive to low flow rates Straight flow channel Maximum flows up to 2 ml/s Fast measurement response for dosing monitoring Super-fast sampling speed Product Summary The SLQ-QT105 Flow Meter offers an exceptional liquid flow sensing performance based on a thermal microsensor technology. It is made for use with hydrocarbon based liquids. The fluidic part of the device is based on just a straight flow path and no moving parts. Due to the short response time the SLQ-QT105 allows to monitor highly dynamic processes such as fast dosing operations. In many applications this allows to increase process reliability and reduce consumption of precious media. Sensing Performance with Reference Medium Isopropyl Alcohol In Table 1 the flow meter’s performance for use with Isopropyl Alcohol (IPA) is given. For other hydrocarbons the values will be different as the performance depends on the used medium. The repeatability depends on the averaging time of the signal. Longer averaging time leads to better repeatability of the flow measurement (see table 1). Table 1: Model specific performance of SLQ-QT105 for IPA (all data at 23°C, 1 barabs unless otherwise noted) Parameter Maximum Flow Rate a Repeatability (1σ) (whichever is greater) Flow Detection Response Time Accuracy b Response Time On Power-Up Optimal Heat Up Time Mounting Orientation Sensitivity c Operating Temperature Operating Pressure Proof Pressure Ambient Storage Temperature Condition 0.2 sec averaging time for constant flow measurement for IPA; 23°C (empty flow channel) Medium IPA With IPA, 50 - 2000 µl/s c Normal position: horizontal flow channel, connector horizontally. a b

Sensing Performance with Other Media but Isopropyl Alcohol The flow meter’s measurement performance for media other than Isopropyl Alcohol (IPA) depends strongly on the properties of the liquid. The performance for most hydrocarbon based liquids, i.e. solvents and solvent based photoresists, is similar to the performance with IPA, with the exception of the absolute accuracy. The flow meter’s calibration is only valid for IPA. For other liquids the repeatability of the measurement is still excellent. It is the user’s responsibility to test the flow meter with all liquids that are to be used with...

On-Site Flow Path Cleaning The most important rules in handling the sensor are: • avoid letting fluid dry in the flow meter that could leave deposits • never attempt to mechanically clean the sensors inner flow channel. Since the sensor relies on a thermal measurement through the quartz glass wall of the inner flow channel, one must take precautions to avoid any build-up or deposits that could alter the thermal properties of the capillary and thus influence the measurement precision. Also when changing from one liquid to another, sufficient cleaning procedures have to be performed to avoid non-soluble...

6.1.2 EMI The flow meter complies with EN55011-1. This does only concern the flow meters body and not the cable. It is the task of the user to confirm that the electromagnetic radiation of the cable and communication setup satisfies his demands. 6.2 Mechanical Specifications Table 5: Mechanical specifications Parameter Fluid Connector Standard (Fittings) Pressure Drop at 120 ml/min IPA, 25°C, Flow Channel, Inner Diameter Protection Class Total Mass Super 300 Type Pillar Fitting 4x3mm < 10 mbar 1.95 mm IP32 ~ 45 g 6.3 Wetted Parts Table 6: Wetted Materials Part Ports Sealing Part Capillary Material...

Flow Meter Lifetime The expected lifetime of the flow meter is 3 years of constant operation, under the condition that the sensor is used with non-depositing and non-abrasive liquids in a clean and dry environment free of aggressive vapours in an environment with constant temperature within the range specified in chapter 2. in compliance with all other handling instructions. The expected lifetime is defined as the mean time between failures. Failures are defined as: reduction of sensing repeatability below the specified limits. electrical failure as: digital communication impossible or not complying...

Important Notices Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the data sheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application, Buyer shall defend, indemnify...