Datasheet LG16 Media Isolated Microfluidic Flow Sensor ■ Liquid flow rates up to 5000 |jl/min ■ Resolutions down to sub nl/min ■ Totally non invasive, pressures up to 200 bar ■ Digital I2C interface or analog out 0-5 V 1 Introduction LG16 The LG16 Liquid Flow Sensor series enables fast, non invasive measurements of very low liquid flow rates below 5 ml/min. This product line is especially suited for OEM volume applications requiring small sized components with high performance at low cost. Excellent chemical resistance and bio-compatibility are ensured: The flow path of the LG16 Liquid Flow Sensors is formed by a simple, straight glass capillary. This Swiss made, non invasive sensors are based on Sensirion's patented CMOSens® Technology (US Patent 6,813,944 B2). The fourth generation MEMS sensors combine a thermal high precision sensor element with amplification circuits and digital intelligence for linearization and temperature compensation on one single microchip - the products core element. 2 Sensing Performance Table 1 : Model specific performance of LG16 (all data for medium H2O, 20°C, 1 barabs unless otherwise noted) Parameter LG16-0025 LG16-0150 LG16-0480 LG16-1000 LG16-2000 Maximum Flow Rate 1.50 7.00 50 1000 5000 ml/min Lowest Calibrated Flow (LCF) 0.07 0.4 1.0 30 200 ml/min Digital Resolution at LCF (16 bit) 0.084 0.24 0.60 12 150 nl/min Accuracya above LCF 10 5.0 5.0 5.0 5.0 % of m.v.b Accuracy below LCF 0.5 0.25 0.1 0.15 0.2 % of full scale Signal Noise, 16 bit digital output - at LCF - at Maximum Flow Rate 4.5 4.5 4.5 4.5 4.5 LSB 0.002 0.010 0.025 0.25 3.0 ml/min 0.004 0.040 0.300 5.0 20 ml/min Signal Noise, analog output, RMS < 2 mV Temperature Coefficient 0.15 0.09 0.13 0.1 0.1 (% m.v.b) / K Mounting Orientation Sensitivityc - <0.4 <0.4 1.0 1.5 % of full scale Flow Detection Response Time t63 40 40 ms Response Time On Power-Up 120 120 ms Digital Sampling Rate, 16 bit 74 74 ms Digital Sampling Rate, 9 bit 1 1 ms Operating Temperature +10...+50 +10...+50 °C Ambient storage temperature -10...+60 -10...+60 °C 3 Output Signais The OEM flow sensor LG16 shows bi-directional, linear transfer characteristics. The product comes fully calibrated for water - for volume applications flow calibration for methanol or other media is available on request. a Better available on request. b Measured value c Normal position: Horizontal flow channel www.sensirion.com January 2011 _ V1.2 1/5

SENSIRION LG16 Liquid Mass Flow Sensor the sensor company The LG16 can be ordered as analog output version (0...5V, LG16-xxxx-A) or as digital output version (LG16-xxxx-D). Digital communication between a master and the LG16-xxxx-D sensor runs via the standard I2C-interface. The physical interface consists of two bus lines, a data line (SDA) and a clock line (SCL). These lines can be used on 3.3V or 5.0V level with a clock frequency of 100 kHz. For the detailed specifications of this PC communication refer to the Sensirion "User Manual PC-Mode SF04". 4 Electrical and Mechanical Specifications...

LG16 Liquid Mass Flow Sensor 4.4 Mechanical Spcifications and Pressure Rating Inside the LG16 flow sensors a highly sensitive microsensor-chip is mounted on the outside of a straight glass capillary and allows to measure the flow through the wall (US Patent 6,813,944 B2) using a thermal principle. Table 4: Mechanical Specifications and Pressure Rating Parameter LG16-0025 LG16-0150 LG16-0480 LG16-1000 LG16-2000 Fluid Connector Ports (Fittings) UNF 6-40 for 1/32" OD tubing VICI® (Valco) Nanovolume compatible %-28 for 1/16" or 1/8" OD plastic tubing Wetted Materials: 陕 Internal Sensor Capillary...

SENSIRION LG16 Liquid Mass Flow Sensor 7 Important Notices 7.1 Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the data sheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized...

LG16 Liquid Mass Flow Sensor Headquarter and Sales Offices SENSIRION AG Laubisruetistr. 50 CH-8712 Staefa ZH Switzerland Sensirion Inc., USA phone: +1 805 409 4900 info [email protected] www.sensirion.com Sensirion Korea Co. Ltd. phone: +82 31 345 0031 3 [email protected] www.sensirion.co.kr phone: +41 44 306 40 00 fax: +41 44 306 40 30 [email protected] www.sensirion.com Sensirion AG (Germany) phone: +41 44 927 11 66 [email protected] www.sensirion.com Sensirion Japan Co. Ltd. phone: +81 3 3444 4940 [email protected] www.sensirion.co.jp Sensirion China Co. Ltd. phone: +86 755 8252 1501...