Liquid Flow Meter SLQ-QT500
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Catalog excerpts

Liquid Flow Meter SLQ-QT500 - 1

Interface Options SLQ-QT500 Liquid Flow Meter High Purity Flow Meter ■ Liquid flow rates up to 120 ml/min ■ Dual calibration for IPA and H2O ■ Response time < 50 ms ■ Straight flow channel, no moving parts ■ For a wide range of viscosities ■ Inert wetted materials (PFA, Quartz) The SLQ-QT500 Liquid Flow Meter enables fast, non-invasive measurements of liquids for demanding high purity applications. Dual calibration (water, H2O; and isopropyl alcohol, IPA) allows flow monitoring for water-based or hydrocarbon-based liquids. The straight-through wetted flow path has no moving parts and consists entirely of only PFA and Quartz. Its excellent chemical compatibility makes the SLQ-QT500 the first choice for measuring even aggressive chemicals or high-viscosity liquids. Analog - Voltage output (0-10 V) - Additional operation modes For more information on communication, please refer to page 3 of this document. Table 1: Performance of the SLQ-QT500 (all data for medium IPA, 23°C, unless otherwise noted) a Flow rate at which the flow meter output saturates; b Accuracy with straight inlet tube; c Accuracy below ±1000 pl/s. See the charts in section 2 for the accuracy specification between 1000 pl/s and 2500 pl/s; d Non-condensing, flow path empty; e pressure limited by PFA tubing.

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Liquid Flow Meter SLQ-QT500 - 2

1.1 Calibration Field Information The SLQ-QT500 Liquid Flow meter holds two calibrations, one for isopropyl alcohol (IPA) and one for water. Each calibration is stored on a separate calibration field (CF): ■ Calibration field 0: IPA (factory default) ■ Calibration field 2: H2O The default calibration field (i.e. the active calibration field at power up) can be permanently changed via I2C or RS485 commands. Alternatively, the default calibration field can be changed using the USB-RS485 Sensor Viewer which is part of the Flow Meter Kit and also available in the download center on...

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Liquid Flow Meter SLQ-QT500 - 3

3 Communication with the Liquid Flow Meter Table 2: DC characteristics The SLQ-QT500 flow meter shows bidirectional, linear transfer characteristics. The product comes fully calibrated for IPA and water. Digital sampling time at 16 bit resolution: 74 ms Digital sampling time at 9 bit resolution: 1 ms 3.1 Electrical Specifications This section describes electrical specifications when connecting directly to the sensor's M8 connector for I2C communication. The preferred mode of communication is via the SCC1 interface cables. See the respective SCC1 datasheets for further details. 3.2...

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Liquid Flow Meter SLQ-QT500 - 4

4 Fluidic Connection Table 4: Fluidic specifications and pressure rating a Important! This table lists the recommended minimum length from a fluidic point of view. A greater length may be required depending on the selected type of fluidic connector.

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Liquid Flow Meter SLQ-QT500 - 5

5 Mechanical Specifications5.1 Dimensions Table 6: Mechanical dimensions

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Liquid Flow Meter SLQ-QT500 - 6

5.3 Labels The SLQ-QT500 has two labels on opposite sides of the housing. Both labels are solvent resistant and contain the following information ■ Sensirion product name ■ Calibrations on the flow meter: calibration field (CF), type of liquid (H2O or IPA), full scale flow rate ■ Serial number as text and encoded in 2D bar code ■ Positive flow direction marked by arrow SENSIRION TH6 SENSOR COMPANY 6 Cleanliness of flow path 6.1 Particles The flow path of each SLQ-QT500 flow meter is flushed with ultra-pure water as a final production step before packing. The flow meter is then sealed in PE...

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Liquid Flow Meter SLQ-QT500 - 7

Important Notices Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the datasheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application,...

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