Interface Options SLI Liquid Flow Meter Series Media Isolated Microfluidic Flow Meter ■ Liquid flow rates up to 10 ml/min ■ Non-invasive measurement ■ Different interface options ■ 40 ms flow detection response time The SLI Liquid Flow Meter enables fast, non-invasive measurements of very low liquid flow in the pl/min- to ml/min-range. Excellent chemical resistance is ensured: The flow path of the SLI Liquid Flow Meter is formed by a simple, straight glass capillary. The fourth generation MEMS sensors combine a thermal high precision sensor element with amplification circuits and digital intelligence for linearization and temperature compensation on one single microchip - the product's core element. Analog - Voltage Output (0-10 V) - Additional operation modes For more information on communication, please refer to page 2 of this document. a Flow rate at which the sensor output saturates. See section 2 for performance between full scale and saturation point b Extended range up to 10500 pl/min, see section 2 for performance specifications c Measured value d Maximum additional offset when mounted vertically e Non-condensing, flow path empty

Table 2: Model specific performance of SLI (all data for medium IPA, 23°C) aFlow rate at which the sensor output saturates bMeasured value 1.1 Calibration Field Information The SLI Liquid Flow Meters hold calibrations for two liquids, one for water (H2O) and one for isopropyl alcohol (IPA). Each calibration is stored on a separate calibration field (CF): ■ Calibration field 0: H2O (factory default) ■ Calibration field 1: IPA ■ Calibration field 2 (SLI-2000 only, starting from SN 1627-00000): H2O extended range The default calibration field (i.e. the active calibration field at power up) can be...

SLI-0430 Absolute Accuracy with H20 Accuracy (% of measured value) Accuracy (% of measured value) Accuracy (% of measured value) SLI-1000 Absolute Accuracy with H20 SLI-2000 Absolute Accuracy with H20 incl. Extended Range) Flow rate (pil/min H20) Figure 1: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and absolute error in pl/min (right column) for H2O www.sensirion.com

SLI-0430 Absolute Accuracy with IPA Accuracy (% of measured value) Accuracy (% of measured value) Accuracy (% of measured value) Flow rate (pil/min IPA) SLMQQO Absolute Accuracy with IPA Flow rate (pl/min IPA) SLI-2000 Absolute Accuracy with IPA Flow rate (ml/min IPA

3 Communication with the Sensor Table 3: Electrical pinout 3.2 Electrical Connector and Pinout The flow meter is equipped with a male connector type M8, 4-pin, threaded lock according to IEC 61076-2-101 (Ed. 1)/ IEC 60947-5-2, and is compatible with Sensirion's SCC1 interface cables. 3.3 Communication via USB cable The Sensirion USB Sensor Cable provides an easy to use USB Interface for laboratory and desktop use. For further information please see the SCC1-USB Sensor Cable datasheet, available on www.sensirion.com/liquidflow-download. 3.4 Digital Communication via RS485-Bus The SCC1-RS485 Sensor...

4 Fluidic Connection Table 5: Fluidic Specifications and Pressure Rat a1/8” OD tubing with 2 mm minimum ID is recommended for the SLI-2000. For more information on the fluidic connection please find: “Application Note Sensor Ports and Tubing Connections” in the Download Center on our webpage (www.sensirion.com/liquidflow-download). 5 Mechanical Specifications Table 6: Mechanical Specifications

6 Ordering Information For OEM applications, the liquid flow meter can be purchased in larger quantities without any additional parts. For optimum performance, Sensirion recommends using the SLI liquid flow meters in combination with the SCC1 interface cables. For laboratory use and technology evaluation, the Liquid Flow Meter Kit SLI-XXXX can be ordered. This laboratory-package contains: ■ Liquid Flow Meter SLI-XXXX ■ Fitting Material for 1/8'' tubing ■ PC Software (Viewer & Data Export Tool) ■ SCC1-USB Sensor Cable with USB connector for plug-and-play connection to a PC ■ SCC1-Analog...

Important Notices Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the datasheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application, Buyer...